Dry vacuum pump pumping process simulation test method and test system

Abstract

Disclosed are a vacuum pump air exhaust process simulating and testing method and a testing system. By means of a built simulating vacuum chamber, common elements in various dry-type vacuum pump application environments such as gas, liquid, electricity, magnetism, heat, dust, and corrosion are integrated, various sensors are used to perform feedback on a signal simultaneously having temperature, humidity, gas ingredient, real-time image, pressure, traffic and noise, and multiple control systems are used to perform monitoring, so as to check and improve dry-type vacuum pump air exhaust process adaptation situations. The testing system uses strict contaminant collecting and shuttling treatment, has a danger warning and automatic protecting function system, is characterized by being secure, intelligent, and green and environment-friendly, has good repeatability, and may simulate vacuum pump air exhaust process environments such as cleaning, mildly-polluted, intermediately-polluted and seriously-polluted vacuum environments comprising transfer, physical vapor deposition, chemical vapor deposition, etching, photolithography, chemical engineering, and pharmacy.

Description

technical field

[0001] The invention belongs to the technical field of vacuum pumps, and in particular relates to a simulation test method and a simulation test system of a dry vacuum pump pumping process. Background technique

[0002] In recent years, with the large-scale rise of emerging strategic industries such as semiconductor electronics, photovoltaics, flat panel displays, semiconductor lighting, and solar photovoltaics, and the industrial upgrading of the chemical, pharmaceutical, and food packaging industries, the demand for dry vacuum pumps in various industries has further increased. The dry pump manufacturing industry is developing rapidly. With the increasing demand for dry vacuum pumps at home and abroad, the requirements for dry vacuum pumps are becoming more and more stringent, and the vacuum pump manufacturing industry is facing huge challenges and opportunities. The application occasions of dry vacuum pumps are becoming more and more extensive, and the div...

Examples

Embodiment 1

[0059] Embodiment 1 Tubular PECVD pumping process simulation test

[0060] Embodiment 1 provides a dry vacuum pump pumping process simulation test method equipped with tubular PECVD equipment, and the dry vacuum pump pumping process simulation test system disclosed in the present invention is used for testing.

[0061] PECVD is one of the typical production processes in the IC industry. Its dry pump consumption is large and the pumping environment is harsh. There is an urgent need for dry pumps to adapt to the harsh pumping process. The pumping process of the PECVD tube furnace is complex, and the gas and by-products of the process include substances that are spontaneously combustible, flammable, corrosive, condensable and toxic. The dry pump working under this process must have high reliability and corrosion resistance. Usually, absolute safety is required in the pumping process, and these gases usually have a relatively high temperature, and excessive cooling is not allowed...

Embodiment 2

[0064] Example 2 MOCVD pumping process simulation test

[0065] Another typical harsh process is the MOCVD pumping process. Since MOCVD works in a relatively high-pressure vacuum, it contains metal debris and smoke, and it is explosive due to the hydrogen gas. The simulation of the MOCVD pumping process is roughly equivalent to that of PECVD, but on the input elements, a certain amount of metal microbeads and ceramic microbeads should be added, and H2 gas should be filled.

Embodiment 3

[0066] Embodiment 3 RH / VOD extraction process simulation test

[0067] RH / VOD is a typical vacuum metallurgical process for vacuum degassing treatment of molten steel. Traditionally, a steam jet pump is used as the air extraction system. However, due to the low extraction efficiency of the water vapor jet pump and the large footprint , Huge power consumption and water consumption, time-consuming and labor-intensive maintenance, there are already examples of using dry vacuum pumps (units) to replace them. The extraction process of RH / VOD is also relatively harsh, usually containing a variety of by-products such as various gases, high-temperature water vapor, metal debris, slag, and dust.

[0068] For the simulation test of the RH / VOD pumping process, the basic method is similar to that of PECVD, but the proportion of water and metal microbeads in the input elements is increased, and a certain amount of dust should be added at the same time. During the simulation, fine sand part...

technical field

[0001] The invention belongs to the technical field of vacuum pumps, and in particular relates to a simulation test method and a simulation test system of a dry vacuum pump pumping process. Background technique

[0002] In recent years, with the large-scale rise of emerging strategic industries such as semiconductor electronics, photovoltaics, flat panel displays, semiconductor lighting, and solar photovoltaics, and the industrial upgrading of the chemical, pharmaceutical, and food packaging industries, the demand for dry vacuum pumps in various industries has further increased. The dry pump manufacturing industry is developing rapidly. With the increasing demand for dry vacuum pumps at home and abroad, the requirements for dry vacuum pumps are becoming more and more stringent, and the vacuum pump manufacturing industry is facing huge challenges and opportunities. The application occasions of dry vacuum pumps are becoming more and more extensive, and the div...

Examples

Embodiment 1

[0059] Embodiment 1 Tubular PECVD pumping process simulation test

[0060] Embodiment 1 provides a dry vacuum pump pumping process simulation test method equipped with tubular PECVD equipment, and the dry vacuum pump pumping process simulation test system disclosed in the present invention is used for testing.

[0061] PECVD is one of the typical production processes in the IC industry. Its dry pump consumption is large and the pumping environment is harsh. There is an urgent need for dry pumps to adapt to the harsh pumping process. The pumping process of the PECVD tube furnace is complex, and the gas and by-products of the process include substances that are spontaneously combustible, flammable, corrosive, condensable and toxic. The dry pump working under this process must have high reliability and corrosion resistance. Usually, absolute safety is required in the pumping process, and these gases usually have a relatively high temperature, and excessive cooling is not allowed...

Embodiment 2

[0064] Example 2 MOCVD pumping process simulation test

[0065] Another typical harsh process is the MOCVD pumping process. Since MOCVD works in a relatively high-pressure vacuum, it contains metal debris and smoke, and it is explosive due to the hydrogen gas. The simulation of the MOCVD pumping process is roughly equivalent to that of PECVD, but on the input elements, a certain amount of metal microbeads and ceramic microbeads should be added, and H2 gas should be filled.

Embodiment 3

[0066] Embodiment 3 RH / VOD extraction process simulation test

[0067] RH / VOD is a typical vacuum metallurgical process for vacuum degassing treatment of molten steel. Traditionally, a steam jet pump is used as the air extraction system. However, due to the low extraction efficiency of the water vapor jet pump and the large footprint , Huge power consumption and water consumption, time-consuming and labor-intensive maintenance, there are already examples of using dry vacuum pumps (units) to replace them. The extraction process of RH / VOD is also relatively harsh, usually containing a variety of by-products such as various gases, high-temperature water vapor, metal debris, slag, and dust.

[0068] For the simulation test of the RH / VOD pumping process, the basic method is similar to that of PECVD, but the proportion of water and metal microbeads in the input elements is increased, and a certain amount of dust should be added at the same time. During the simulation, fine sand part...

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