High-flux quick-detection microfluidic chip directed towards pathogenic microorganism and preparation method for microfluidic chip
A microfluidic chip and pathogenic microorganism technology, applied in the field of medical and health detection, can solve the problems of unfavorable health law enforcement work site, undetectable microorganisms, and long analysis time, etc., to achieve low cost, simple manufacture, and small chip size Effect
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[0033] 1. Substrate preparation: Place the monocrystalline silicon wafer in Piranha solution (98% concentrated sulfuric acid: 30% hydrogen peroxide = 7:3, volume ratio), boil and wash for 15 minutes. Rinse 5 times with deionized water, then dry the surface of the silicon wafer with nitrogen, and bake at 200°C for 30 minutes.
[0034] 2. Spin coating: Pour the AZ-50XT series of positive light glue on the center of the silicon wafer surface, tilt the edge of the silicon wafer so that the positive light glue covers most of the silicon wafer, and after standing for 10 minutes, use a spin coater (Spin-Coatemr KW-4A type) Spin coating at 2000 rpm for 1 minute.
[0035] 3. Soft baking: place the spin-coated silicon wafer on a constant temperature heating plate for baking, and let it stand at 65°C, 115°C, and 65°C for 1 minute, 4 minutes, and 1 minute, respectively.
[0036] 4. Exposure: Place the mask on the surface of the cured positive photoresist on the surface of the silicon wafer...
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