High-performance electrochemical capacitor plate material and preparation method thereof
An electrochemical and capacitor technology, applied in the field of electrochemical capacitors, can solve the problems of unfavorable silicon-based integrated circuit technology, limited capacitance capacity, low electrolyte wettability, etc., and achieve the effect of cheap drugs, easy realization, and simple formula
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Embodiment 1
[0041] 1) Preparation of silicon microchannels:
[0042] The preparation process of the electrochemical etching microchannel based on the MEMS process has been described in detail in the patent application 200610025900.7. The microchannel holes are disk-shaped, with a diameter distribution of 5 microns and a depth of about 200 microns. Its etching depth and width can be controlled by etching time, etchant concentration, temperature, etching voltage and light irradiation intensity.
[0043] 2) Preparation of Ni / Si-MCP:
[0044] With the silicon microchannel as the substrate, after the surface pretreatment, the nickel single film is ring-coated on the inner wall of each channel by the electroless plating method to form a nickel / silicon microchannel nanocomposite structure. Surface pretreatment refers to: soaking with 1% polyethylene glycol octyl phenyl ether solution for 30s; the formula of electroless nickel plating solution is: nickel sulfate hexahydrate with a concentration...
Embodiment 2
[0059] 1. Preparation of silicon microchannels:
[0060] The preparation process of the electrochemical etching microchannel based on the MEMS process has been described in detail in the patent application 200610025900.7. The microchannel holes are disk-shaped, with a diameter distribution of 5 microns and a depth of about 200 microns. Its etching depth and width can be controlled by etching time, etchant concentration, temperature, etching voltage and light irradiation intensity.
[0061] 2. Preparation of Ni / Si-MCP:
[0062] The silicon microchannel is used as the substrate, and after surface pretreatment, a thin layer of metal nickel is coated on the inner wall of each channel by electroless plating to form a nickel / silicon microchannel nanocomposite structure. Surface pretreatment refers to: soaking with 1.5% polyethylene glycol octylphenyl ether solution for 40s; the formula of electroless nickel plating solution is: nickel sulfate hexahydrate with a concentration of 1....
Embodiment 3
[0074] 1. Preparation of silicon microchannels:
[0075] The preparation process of electrochemical etching microchannels based on MEMS technology has been described in detail in the patent application 200610025900. The microchannel holes are disk-shaped, with a diameter distribution of 5 microns and a depth of about 200 microns. Its etching depth and width can be controlled by etching time, etchant concentration, temperature, etching voltage and light irradiation intensity.
[0076] 2. Preparation of Ni / Si-MCP:
[0077]The silicon microchannel is used as the substrate, and after surface pretreatment, a thin layer of metal nickel is coated on the inner wall of each channel by electroless plating to form a nickel / silicon microchannel nanocomposite structure. Surface pretreatment refers to: soaking with 1.5% polyethylene glycol octyl phenyl ether solution for 50s; the formula of electroless nickel plating solution is: nickel sulfate hexahydrate with a concentration of 1.0 mol / ...
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