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33results about How to "Plating solution formula is simple" patented technology

Micro-pore electroplated copper filling method for three-dimensional (3D) copper interconnection high aspect ratio through-silicon-via technology

The invention discloses a micro-pore electroplated copper filling method for a three-dimensional (3D) copper interconnection high aspect ratio through-silicon-via technology. The micro-pore electroplated copper filling method comprises the following steps of: 1, preparing an electroplating solution of a copper methane sulfonate system; 2, wetting micro pores of the through-silicon-via technology through electroplating pretreatment; 3, electrifying and slotting, and increasing the ultralow current diffusion step, so that the copper ion and additives are reasonably distributed on the surfaces and inside the micro pores through the through-silicon-via technology; 4, connecting a silicon wafer where the through-silicon-via technology is positioned with a cathode of a power supply, so that the electroplating surface of the wafer is completely soaked in the electroplating solution, step-by-step current electroplating is performed under the condition that the cathode is rotated or stirred, and the electroplating conditions comprise the current density of 0.01-10A / dm<2> and the temperature of 15-30 DEG C; and 5, completely and thoroughly washing the wafer by using deionized water, performing spin-dry or blow-dry. The provided micro-pore electroplated copper filling method for the 3D copper interconnection high aspect ratio through-silicon-via technology is high in pore filling speed and thin in surface copper, hole and crack risks are avoided, and complete filling of high-difficulty hole with the depth-to-width ratio of more than 10:1 can be realized.
Owner:SHANGHAI SINYANG SEMICON MATERIALS

Cu-Zn-Sn ternary alloy cyanide-free imitation gold plating solution and use method thereof

The invention discloses a Cu-Zn-Sn ternary alloy cyanide-free imitation gold plating solution and a use method thereof. In the plating solution, copper sulfate, zinc sulfate and stannous sulfate are used as main salts, potassium pyrophosphate is used as a main complexing agent, ethylene diamine, potassium citrate and nitrilotriacetic acid are used as auxiliary complexing agents, sulfuric acid is used as an antioxidant and an anti-hydrolysis agent for stannous ions, and potassium hydroxide is used as a regulator for regulating the pH value of the plating solution. The operating conditions are as follows: the cathode current density is 1.0-3.0A/dm2, the pH value is 8.0-10.0, the temperature of the plating solution is room temperature, the plating time is 60-90s, the mechanical stirring or cathode movement is adopted, the anode material is 316L stainless steel, and the plating process is carried out on the substrate of a plating bright nickel layer. The invention has simple formula of the plating solution, easy control, wide process parameter range, fine crystal, good appearance color, stable plating solution, long service life, strong uniformly plating capacity and covering capacity, and high stability in batch production. The technology can replace the cyanide imitation gold plating process to be used as the plating process for imitating 9K, 18K or 24K gold on surfaces of decorative articles such as jewelry, clocks, handicraft articles and the like.
Owner:KUNMING UNIV OF SCI & TECH

Lead-free electroless tin plating solution

InactiveCN102994994AEnables continuous autocatalytic depositionReduce typesLiquid/solution decomposition chemical coatingSolubilityPorosity
The invention relates to a lead-free electroless tin plating solution. The lead-free electroless tin plating solution is characterized by comprising the following components: 20 to 30g / L of stannous mono-sulphate, 60 to 120g / L of thiourea, 15 to 25g / L of citric acid, 20 to 50g / L of sulfur dioxide, 3 to 5g / L of ethylene diamine tetraacetic acid, 0.01 to 0.05g / L of polyethylene glycol, 20 to 55m / L of 98% of concentrated sulfuric acid, 0.5 to 1.0g / L of gelatin, and the balance of regulator. The lead-free electroless tin plating solution has the advantages that few categories of chemical materials are used and cost is low; the tin can be continuously deposited at a high speed on copper and a copper alloy substrate, thus semi-bright chemical coatings with different thicknesses can be produced, and the flatness of the chemical coatings can be improved; and the lead-free electroless tin plating solution is remarkable in grain refinement, low in porosity, simple in formula of plating solution, easy to control, stable in plating solution, long in service life and high in stability in batch production; and polyethylene glycol is a nontoxic and nonirritating substance with high water solubility, and can be combined with other materials without producing harmful substances.
Owner:NANTONG HUIFENG ELECTRONICS TECH

High-performance electrochemical capacitor plate material and preparation method thereof

The invention discloses a high-performance electrochemical capacitor plate material and a preparation method thereof, and belongs to the field of capacitor manufacture. The high-performance electrochemical capacitor plate material is silicon micro-channel supported neodymium-doped bismuth titanate, and adopts the structure that a neodymium-doped bismuth titanate thin film layer is generated on the inner wall of a three-dimensional silicon micro-channel plate through vacuum filtration and high-temperature oxidation to be used as an electrochemical capacitor active layer. The preparation method of the high-performance electrochemical capacitor plate material comprises the following steps: preparing the three-dimensional silicon micro-channel plate by adopting an electrochemical method, then, depositing a nickel layer by adopting a electroless plating method, preparing a nano-neodymium-doped bismuth titanate thin film layer by adopting a sol-gel method, and finally, performing rapid thermal annealing in an oxygen atmosphere, so as to form a neodymium-doped bismuth titanate/silicon micro-channel composite structure material. The high-performance electrochemical capacitor plate material provided by the invention provides a short transmission/diffusion path length, has larger specific area, and is conductive to obtaining higher energy density and power density.
Owner:QIQIHAR UNIVERSITY

Stabilizer for electroplating brightening tin and tin alloy and preparation method thereof

InactiveCN106521570AImprove coverageImprove the corrosion resistance of the nickel layerCorrosionPolyethylene glycol
A stabilizer for electroplating brightening tin and tin alloy comprises, by weight, 100-120 parts of sodium hypophosphite, 20-30 parts of ascorbic acid, 30-40 parts of polyethylene glycol and 10-15 parts of sulfanilic acid. The molecular weight M of the polyethylene glycol is 6000-12000. A preparation method of the stabilizer for electroplating brightening tin and tin alloy includes the following steps that (a) polyethylene glycol is weighed, distilled water is added to the polyethylene glycol to form a polyethylene glycol solution with the concentration of 5-8%, and heating and stirring are conducted until the polyethylene glycol is completely dissolved; (b) sodium hypophosphite is added and stirred until the sodium hypophosphite is completely dissolved; (c) ascorbic acid is added into the solution and stirred until the ascorbic acid is completely dissolved; (d) sulfanilic acid is added into the solution and stirred until the sulfanilic acid is completely dissolved; and (e) distilled water is supplemented and added to enable the concentration of the polyethylene glycol to be 3-4%, and the operation is competed after uniform stirring. The stabilizer for electroplating brightening tin and tin alloy has the advantages of being high in corrosion resistance, good in covering capacity, good in stability, high in electroplating efficiency and capable of being stored for a long time. A tin plating solution is stable. A clad layer obtained through electroplating is uniform, compact and good in combination force.
Owner:HUBEI UNIV

Semi-bright lead-free chemical tinning liquid and using method thereof

InactiveCN101717929BEnables continuous autocatalytic depositionFast depositionLiquid/solution decomposition chemical coatingThioureaBenzaldehyde
The invention discloses new semi-bright lead-free chemical tinning liquid and a using method thereof. A semi-bright silver tin-copper alloy chemical plating layer is obtained on copper and copper alloy matrix. In the chemical plating liquid, tin sulfate is used as a main salt, thiourea is used as a main complexing agent, citric acid is used as an auxiliary complexing agent, sodium hypophosphite is used as a reducing agent, ethylene diamine tetraacetic acid is used as an antioxidant, sulfuric acid is used as a stabilizing agent, gelatin is used as a leveling agent, and benzaldehyde is used as an auxiliary brightening agent. The pH value of the plating liquid is 0.8 to 2.0, the temperature of the plating liquid is between 80 and 90 DEG C, the carrying capacity of the plating liquid is 0.8 to 1.5dm2 / L, and the mechanical stirring speed is 50 to 100 rpm. The continuous self-catalytic deposition of tin is implemented on the copper and copper alloy matrix, plating layers of different thicknesses can be obtained by controlling the chemical plating time, and the deposition speed is high; crystalline grains are obviously refined, the surface flatness of the plating layer is improved, and the plating surface area is large; the plating layer and the matrix are combined firmly; and after passivating treatment, the change resistance of the plating layer is high. The technology has broad application prospect in products such as deep hole pieces, blind hole pieces, small-sized electronic parts and components which are difficult to process, printed circuit boards (PCB) and the like.
Owner:KUNMING UNIV OF SCI & TECH

Continuously self-catalyzed deposition chemical plating solution of tin and using method thereof

InactiveCN101724834BEnables continuous autocatalytic depositionFast depositionLiquid/solution decomposition chemical coatingAntioxidantBenzaldehyde
The invention discloses continuously self-catalyzed deposition chemical plating solution of tin and a using method thereof. Half-bright and silvery-white tin-copper alloy deposition layers are obtained on pure copper and a copper alloy substrate. In the chemical plating solution, stannous chloride serves as a main salt, thiourea serves as a main complexing agent, trisodium citrate serves as an auxiliary complexing agent, sodium hypophosphite serves as a reducing agent, disodium ethylene diamine tetraacetate serves as an antioxidant, a hydrochloric acid serves as a stabilizing agent, gelatin serves as a leveling agent and benzaldehyde serves as an auxiliary brightening agent. The using method comprises the following operating conditions that: the pH value of the plating solution is 0.8 to 2.0; the temperature is 80 to 90 DEG C; the loading capacity is 0.8 to 1.5 dm2 / L; and the mechanical stirring speed is 50 to 100 rpm. The continuously self-catalyzed deposition chemical plating solution of the tin and the using method thereof have the advantages of capability of obtaining half-bright and silvery-while tin-copper alloy clad layers with different thicknesses by controlling chemical plating time, high deposition rate, remarkable grain refinement, improvement on surface evenness of the clad layer and batch production stability, secure interface combination, strong change resistance of the clad layer after being passivated, and broad application prospect in the products of deep hole elements, blind hole elements, difficult-to-handle miniature electronic components and parts, printed circuit boards PCBs and the like.
Owner:KUNMING UNIV OF SCI & TECH

A high-speed bump electroplating method for copper interconnects

The invention discloses a high-speed embossment electroplating method applied to copper interconnection. A sulfonic acid copper system electroplating liquid is adopted to carry out copper column embossment electroplating; the electroplating conditions are as follows: the current density is 1-25A / dm<2>, and the temperature is 15-35 DEG C; the electroplating liquid comprises 160-350g / L high-purity methanesulfonic acid copper salt, 30-180g / L high-purity methanesulfonic acid and 10-80mg / L chloride ions; the electroplating liquid further comprises 1-10ml / L of an accelerator and 1-10ml / L of a leveling agent; the accelerator is UPB3221A and comprises one or a mixture of several of polydithio dipropane sodium sulfonate, alcohlpropane sulfonate, phenyl dithio propane sodium sulfonate, 3-sulfenyl-1-propanesulfonic acid sodium salt and dimethyl-dithio formamide sulfonic acid; and the leveling agent is UPB3221L and comprises one or a mixture of several of polyethylene glycol, a fatty alcohol alkoxy compound, an ethylene oxide-propylene oxide block copolymer of which the molecular weights are respectively 400, 1,000, 6,000 and 20,000. The high-speed embossment electroplating method applied to copper interconnection, disclosed by the invention, ensures that a copper column has good reliability and uniformity, and at the same time has a relatively high electroplating speed.
Owner:SHANGHAI SINYANG SEMICON MATERIALS

Cu-Zn-Sn ternary alloy cyanide-free imitation gold plating solution and use method thereof

The invention discloses a Cu-Zn-Sn ternary alloy cyanide-free imitation gold plating solution and a use method thereof. In the plating solution, copper sulfate, zinc sulfate and stannous sulfate are used as main salts, potassium pyrophosphate is used as a main complexing agent, ethylene diamine, potassium citrate and nitrilotriacetic acid are used as auxiliary complexing agents, sulfuric acid is used as an antioxidant and an anti-hydrolysis agent for stannous ions, and potassium hydroxide is used as a regulator for regulating the pH value of the plating solution. The operating conditions are as follows: the cathode current density is 1.0-3.0A / dm2, the pH value is 8.0-10.0, the temperature of the plating solution is room temperature, the plating time is 60-90s, the mechanical stirring or cathode movement is adopted, the anode material is 316L stainless steel, and the plating process is carried out on the substrate of a plating bright nickel layer. The invention has simple formula of the plating solution, easy control, wide process parameter range, fine crystal, good appearance color, stable plating solution, long service life, strong uniformly plating capacity and covering capacity, and high stability in batch production. The technology can replace the cyanide imitation gold plating process to be used as the plating process for imitating 9K, 18K or 24K gold on surfaces of decorative articles such as jewelry, clocks, handicraft articles and the like.
Owner:KUNMING UNIV OF SCI & TECH
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