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Silica-based perovskite heterojunction solar cell and preparation method thereof

A silicon-based perovskite, solar cell technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of high-risk chemicals of raw materials, expensive equipment, etc., to achieve superior electrical and optical performance, full utilization, avoidance The effect of high temperature treatment process

Active Publication Date: 2015-10-21
江苏润阳悦达光伏科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, HIT solar cells currently have the following problems: 1. The equipment is expensive, and the raw materials are high-risk chemicals
3. There are a large number of defects in the amorphous silicon thin film body, causing serious recombination
[0005] However, no one has conducted research on the combination of perovskite and silicon substrates to form perovskite-silicon heterojunction solar cells.

Method used

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  • Silica-based perovskite heterojunction solar cell and preparation method thereof
  • Silica-based perovskite heterojunction solar cell and preparation method thereof
  • Silica-based perovskite heterojunction solar cell and preparation method thereof

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Embodiment 1

[0042] Such as Figure 7 As shown in , the silicon-based perovskite heterojunction solar cell provided in this embodiment, the structure of the solar cell from top to bottom is: aluminum electrode, gold conductive film, perovskite, alumina, n-type silicon wafer and Silver electrode with perovskite as CH 3 NH 3 PB 3 .

[0043] The silicon-based perovskite heterojunction solar cell is prepared as follows:

[0044] (1) RCA cleaning process is used to clean the n-type silicon wafer, and then use N 2 Blow dry the silicon wafer;

[0045] The RCA cleaning process is as follows:

[0046] ①Immerse the silicon wafer in 20wt% KOH solution for 3min, keep the solution temperature at 80°C, and then wash it with deionized water;

[0047] ②Immerse the wafer in concentrated H 2 SO 4 and H 2 o 2 (vol%=3:1) mixed solution for 30min, where H 2 o 2 The concentration was 58%, and then washed with deionized water;

[0048] ③ Then immerse in 10% HF solution for 2 minutes, and then wash ...

Embodiment 2

[0065] Such as Figure 7 As shown in , the silicon-based perovskite heterojunction solar cell provided in this embodiment, the structure of the solar cell from top to bottom is: aluminum electrode, gold conductive film, perovskite, alumina, n-type silicon wafer and Silver electrode with perovskite as CH 3 NH 3 PB 3 .

[0066] The silicon-based perovskite heterojunction solar cell is prepared as follows:

[0067] (1) RCA cleaning process is used to clean the silicon wafer, and then use N 2 Blow dry the silicon wafer;

[0068] (2) Using atomic layer deposition (ALD) technology, set the deposition temperature to 180°C, Al(TMA), N 2、H 2 The pulse time of O is: 0.1s, 10s and 0.1s, respectively, the flow rate is: 140sccm, 140sccm and 195sccm, respectively, and 30 cycles are performed to deposit 3nm Al on the surface of the silicon wafer. 2 o 3 ;

[0069] (3) Then use a resistance evaporation coating machine, set the substrate temperature to 28°C, and the vacuum degree to 5...

Embodiment 3

[0074] Such as Figure 7 As shown in , the silicon-based perovskite heterojunction solar cell provided in this embodiment, the structure of the solar cell from top to bottom is: aluminum electrode, gold conductive film, perovskite, alumina, n-type silicon wafer and Silver electrode with perovskite as CH 3 NH 3 PB 3 .

[0075] The silicon-based perovskite heterojunction solar cell is prepared as follows:

[0076] (1) RCA cleaning process is used to clean the silicon wafer, and then use N 2 Blow dry the silicon wafer;

[0077] (2) Using atomic layer deposition (ALD) technology, set the deposition temperature to 220°C, Al(TMA), N 2 、H 2 The pulse time of O is: 0.1s, 10s and 0.1s, the flow rates are: 155sccm, 155sccm and 205sccm, respectively, and 50 cycles are performed to deposit 5nm Al on the surface of the silicon wafer. 2 o 3 ;

[0078] (3) Then use a resistance evaporation coating machine, set the substrate temperature to 30°C, and the vacuum degree to 8×10 -4 Pa,...

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Abstract

The invention discloses a silica-based perovskite heterojunction solar cell and a preparation method thereof. The silica-based perovskite heterojunction solar cell includes an aluminum electrode, a gold conducting film, perovskite, aluminum oxide, an N-type silicon wafer and a silver electrode arranged from top down, wherein the perovskite is CH3NH3PbI3. Compared with a traditional silica-based heterojunction solar cell material, silica-based perovskite heterojunction solar cell provided by the invention has better electric and optical performance. According to the invention, as to a transmitting electrode of the silica-based perovskite heterojunction solar cell, perovskite can absorb visible light while silicon can absorb infrared light, so that segmented light absorption can be realized and utilization of sunlight becomes more adequate. The invention also discloses a preparation method of the silica-based perovskite heterojunction solar cell.

Description

technical field [0001] The invention belongs to the technical field of heterojunction solar cells, and in particular relates to a silicon-based perovskite heterojunction solar cell and a preparation method thereof. Background technique [0002] Our country has been dominated by fossil energy represented by coal for a long time, which not only exacerbates the depletion of fossil energy, but also causes serious pollution to the environment by the exhaust gas and particulate matter emitted by its combustion, which has caused great trouble to the sustainable development of society. Solar energy is clean and renewable energy, and it is one of the most important alternatives to traditional fossil energy. In recent years, the world has vigorously researched and developed photovoltaic technology that utilizes solar energy to generate electricity, and the preparation of low-cost, simple and efficient solar cells has become the focus of research by scientists from all over the world. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/46H01L51/48
CPCH10K71/10H10K85/10Y02E10/549Y02P70/50
Inventor 沈辉吴伟梁包杰邱开富
Owner 江苏润阳悦达光伏科技有限公司
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