A method for preparing ticn composition gradient hard coating by plasma assisted arc technology
A composition gradient, hard coating technology, applied in coating, ion implantation plating, metal material coating process, etc., can solve the problems of good wear resistance of TiNTiC, and achieve excellent coating adhesion and mechanical properties, The effect of fast arc movement, improving processing efficiency and service life
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Embodiment 1
[0035] Example 1: Preparation of TiCN composition gradient hard coating on the surface of YG6 cemented carbide
[0036] 1. Substrate surface pretreatment: (1) Grinding and polishing: The substrate is fully coarsely ground and finely ground on 800 mesh and 1500 mesh diamond grinding wheel discs respectively, and the time of coarse and fine grinding is controlled at 15 minutes. And after fine grinding, the sample is ultrasonically cleaned to remove the abrasive debris and oil stains generated during the grinding process. The ultrasonic cleaning time is 10 minutes and dried in an oven. After the sample is ground, it is polished with W2.0 diamond polishing powder. The polishing time is 20 minutes. After polishing, the surface roughness of the sample is about 0.25±0.03μm. (2) Ultrasonic cleaning: The polished substrate was ultrasonically cleaned with acetone alcohol mixed solution for 30 minutes, and then vacuum-dried.
[0037] 2. Ion cleaning and etching of substrate surface. Be...
Embodiment 2
[0045] Example 2: Preparation of TiCN composition gradient hard coating on the surface of M2 high speed steel
[0046] 1. Substrate surface pretreatment: with embodiment 1
[0047] 2. Ion cleaning and etching on the surface of the substrate: the flow rate of Ar gas is 300 sccm, and the other parameters are the same as in Example 1.
[0048] 3. Coating evaporation deposition: the working current of arc target A and B is 125A; 2 The flow rate is 600sccm, through C 2 h 2 The flow rate is 40 sccm; after 20 minutes of evaporation and deposition, it enters the second stage. In the second stage, on the basis of other process parameters remaining unchanged, the C 2 h 2 The flow rate is increased to 100sccm, and at the same time, the N 2 The flow rate was reduced to 500sccm, and the evaporation deposition time of the second stage was 40min. All the other experimental parameters are the same as in Example 1.
[0049] . Tissue characterization: the characterization method is the ...
Embodiment 3
[0053] Example 3: TiCN Gradient Hard Coating Prepared on the Surface of GCr15 Bearing Steel
[0054] 1. Substrate surface pretreatment: with embodiment 1
[0055] 2. Ion cleaning and etching on the substrate surface: same as in Example 1.
[0056] 3. Evaporation deposition: the working current of arc target A and B is 100A; 2 The flow rate is 500sccm, through C 2 h 2 The flow rate is 5 sccm; after 15 minutes of evaporation and deposition, it enters the second stage. In the second stage, on the basis of other process parameters remaining unchanged, the C 2 h 2 The flow rate is increased to 100sccm, and at the same time, the N 2 The flow rate is reduced to 300sccm, and the evaporation deposition time of the second stage is 30min. All the other experimental parameters are the same as in Example 1.
[0057] . Tissue characterization: the characterization method is the same as in Example 1, Figure 4 and Figure 7 They are the surface and cross-sectional SEM spectra of th...
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