Application of tungsten oxide-vanadium oxide heterojunction nanowire array as gas sensitive material
A technology of tungsten oxide nanowires and nanowire arrays, which is applied in the analysis of materials, material analysis through electromagnetic means, coupling of optical waveguides, etc., can solve the problems that cannot meet the requirements of marketization and integrated applications, and achieve process parameters Easy to control, convenient to operate, improve the effect of sensitivity and response speed
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Embodiment 1
[0034] Step 1. Deposit a tungsten thin film material layer on the single-sided polished silicon wafer of the substrate by magnetron sputtering on the target. Metal tungsten is used as the target material, argon is used as the sputtering gas, the working pressure of the sputtering is 2.0Pa, and the sputtering power 80W, sputtering time is 20min;
[0035] Step 2: Crystallize and grow tungsten oxide nanowires on the tungsten film prepared in step 1 in a vacuum high-temperature tube furnace. The ambient atmosphere is a mixed gas of oxygen and argon. During the growth process of tungsten oxide nanowires, oxygen and argon are controlled The flow rate is 0.1sccm and 35sccm respectively, the growth pressure in the furnace is controlled to be 140Pa, the tube furnace is raised from room temperature 25 degrees Celsius to 700 degrees Celsius, the heating rate is 5 degrees Celsius / min, the temperature is kept at 700 degrees Celsius for 1 hour, and then the temperature is lowered to 400 degr...
Embodiment 2
[0040] Step 1: Deposit a tungsten thin film material layer on the single-sided polished silicon wafer of the substrate by magnetron sputtering on the target, use metal tungsten as the target material, use argon as the sputtering gas, and the sputtering working pressure is 1.0Pa, and the sputtering power 80W, sputtering time is 20min;
[0041] Step 2: Crystallize and grow tungsten oxide nanowires on the tungsten film prepared in step 1 in a vacuum high-temperature tube furnace. The ambient atmosphere is a mixed gas of oxygen and argon. During the growth process of tungsten oxide nanowires, oxygen and argon are controlled The flow rate is 0.1sccm and 50sccm respectively, the growth pressure in the furnace is controlled to be 150Pa, the tube furnace is raised from room temperature 25 degrees Celsius to 600 degrees Celsius, the heating rate is 5 degrees Celsius / min, the temperature is kept at 600 degrees Celsius for 1.5 hours, and then the temperature is lowered to 350 degrees Cels...
Embodiment 3
[0046] Step 1: Deposit a tungsten film material layer on the base alumina ceramic sheet by magnetron sputtering on the target, use metal tungsten as the target material, use argon as the sputtering gas, the sputtering working pressure is 2.0Pa, and the sputtering power is 80W , the sputtering time is 20min;
[0047] Step 2: Crystallize and grow tungsten oxide nanowires on the tungsten film prepared in step 1 in a vacuum high-temperature tube furnace. The ambient atmosphere is a mixed gas of oxygen and argon. During the growth process of tungsten oxide nanowires, oxygen and argon are controlled The flow rate is 0.1sccm and 40sccm respectively, the growth pressure in the furnace is controlled to be 160Pa, the tube furnace is raised from room temperature 20 degrees Celsius to 650 degrees Celsius, the heating rate is 5 degrees Celsius / min, the temperature is kept at 650 degrees Celsius for 2 hours, and then the temperature is lowered to 300 degrees Celsius for 1 hour. Finally, nat...
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