Add/drop filter based on antisymmetric multimode Bragg waveguide grating
A waveguide grating and anti-symmetric technology, which is applied in the field of up-and-down filters based on anti-symmetric multimode Bragg waveguide gratings, can solve the problem that band-pass and band-stop filtering cannot be realized at the same time, the resonant wavelength and filtering bandwidth are small, and the filtering bandwidth is small and other issues, to achieve the effect of easy integration and expansion, simple design structure and compact size
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[0037] Such as figure 1 , figure 2 and Figure 4 As shown, the silicon-on-insulator (SOI) material with a top silicon thickness of 220nm and a silicon oxide buried layer of 2 μm is used. After the wafer surface is cleaned, deep ultraviolet lithography or electron beam direct writing lithography is performed to obtain a silicon etching mask. film, through silicon dry etching, to produce a strip waveguide with a height of 220nm, in which the widths of the two bifurcated waveguides of the asymmetric Y bifurcated waveguide are 500nm and 400nm, the width of the main waveguide is 900nm, and the width of the multimode waveguide is 900nm, anti-symmetric Bragg waveguide gratings are etched on both sides of the multimode waveguide, the rectangular grating tooth is 150nm, its period is 308nm, and the length of the Bragg waveguide grating is 300μm.
[0038] The grating period parameters in the above embodiments are designed for multimode strip waveguides with an operating wavelength of...
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