Method for real-time patterning of nitride growth silicon substrate
A patterning and nitride technology, applied in gaseous chemical plating, coating, electrical components, etc., can solve the problems of unsuitability for commercial application of silicon-based nitride semiconductor devices, increase manufacturing costs, and complex process, and reduce The effect of threading dislocation density, improving crystal quality, and reducing defect density
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[0021] The specific implementation of the method for real-time patterning of a silicon nitride growth substrate provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0022] see figure 1 The method for real-time patterning of a silicon nitride growth substrate in the present invention includes the following steps: step S10, providing a substrate; step S11, using metal droplets to melt back the substrate to form a substrate on the surface of the substrate. Patterned surface; step S12 , epitaxially growing nitride on the patterned surface of the substrate.
[0023] Figure 2A ~ Figure 2D It is a process flow chart of the method for real-time patterning of a nitride growth silicon substrate according to the present invention.
[0024] See step S10 and Figure 2A , providing a substrate 200 . The substrate 200 may be sapphire, silicon carbide, silicon, lithium aluminate, or gallium arsenide.
[0025] Refer to step S1...
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