Composite absorbing layer pyroelectric infrared detector

A pyroelectric infrared and composite absorbing layer technology, which is applied in thermoelectric devices, electric radiation detectors, thermoelectric devices with thermal changes in dielectric constant, etc., can solve the problems of complex manufacturing process and high manufacturing cost, and achieve dense coating layer, High absorption coefficient, effect of improving absorption rate

Active Publication Date: 2016-07-20
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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However, in practical applications, the preparation of the absorbing layer of the pyroelectric infrar

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  • Composite absorbing layer pyroelectric infrared detector

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[0023] Examples:

[0024] A composite absorbing layer pyroelectric infrared detector. The absorbing layer in the infrared sensor unit has a composite layer structure, and from the top layer to the bottom layer, it includes titanium metal layer 1, dielectric layer 2, nickel-chromium alloy layer 3, lithium tantalate Crystal layer 4 and reflective layer 5;

[0025] In the present invention, a pyroelectric infrared detector sensitive element is first prepared. In this embodiment, lithium tantalate crystal is selected, and the lithium tantalate crystal material is subjected to treatments such as grinding, polishing, chemical etching and / or cleaning to obtain a lithium tantalate crystal substrate ;

[0026] The material of the reflective layer 5 can be nickel-chromium alloy, which is deposited on the bottom surface of the lithium tantalate crystal layer 4 by radio frequency magnetron sputtering; the nickel-chromium alloy layer 3 is deposited on the lithium tantalate crystal layer by radio...

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Abstract

The invention discloses a composite absorbing layer pyroelectric infrared detector, and belongs to the technical field of pyroelectric detectors. According to the pyroelectric infrared detector, an absorbing layer comprises a titanium metal layer (1), a dielectric layer (2), a nichrome alloy layer (3), a lithium tantalate crystal layer (4) and a reflecting layer (5) which are arranged from the top layer to the bottom layer in turn. The nichrome alloy layer (3) is deposited on the top surface of the lithium tantalate crystal layer (4). The reflecting layer (5) is deposited on the bottom surface of the lithium tantalate crystal layer (4). The titanium metal layer (1) is deposited on the top surface of the dielectric layer (2). Compared with a single metal absorbing layer film acting as a heat sensitive layer, the prepared composite absorbing layer of the pyroelectric infrared detector has better surface compactness, high absorption coefficient and low heat loss and can acquire high performance heat response so as to be favorable for preparation of the high-precision pyroelectric infrared detector.

Description

technical field [0001] The invention relates to the technical field of pyroelectric detector electronics, in particular to a composite absorption layer pyroelectric infrared detector. Background technique [0002] Pyroelectric detector is a kind of heat-sensitive infrared detector made by using the effect that the spontaneous polarization of pyroelectric material changes with temperature. At a constant temperature, the spontaneous polarization of pyroelectric materials is neutralized by charges in the bulk and surface adsorption. If the pyroelectric material is made into a parallel sheet whose surface is perpendicular to the polarization direction, when infrared radiation is incident on the surface of the sheet, the temperature of the sheet changes due to the absorption of radiation, and the distance and chain between dipoles in the pyroelectric material Angle changes, so that the polarization intensity changes. The neutralization charge cannot keep up with this change due...

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Application Information

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IPC IPC(8): H01L37/02G01J5/34
CPCG01J5/34H10N15/15H10N15/10
Inventor 刘子骥梁志清伍浏权马振东王涛
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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