Check patentability & draft patents in minutes with Patsnap Eureka AI!

Anion exchanger, mixture of anion exchanger and cation exchanger, mixed bed comprising anion exchanger and cation exchanger, production processes therefor, and method for purifying aqueous hydrogen peroxide solution

A technology of anion exchanger and cation exchanger, applied in ion exchange column/bed method, anion exchange, ion exchange, etc., can solve the problems of reducing the yield of semiconducting equipment and so on

Active Publication Date: 2016-08-10
ORGANO CORP
View PDF8 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In particular, when metal components such as iron, aluminum, sodium, calcium, or magnesium are included in a hydrogen peroxide solution, etc., the yield of semiconductive devices decreases

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Anion exchanger, mixture of anion exchanger and cation exchanger, mixed bed comprising anion exchanger and cation exchanger, production processes therefor, and method for purifying aqueous hydrogen peroxide solution
  • Anion exchanger, mixture of anion exchanger and cation exchanger, mixed bed comprising anion exchanger and cation exchanger, production processes therefor, and method for purifying aqueous hydrogen peroxide solution
  • Anion exchanger, mixture of anion exchanger and cation exchanger, mixed bed comprising anion exchanger and cation exchanger, production processes therefor, and method for purifying aqueous hydrogen peroxide solution

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0166] PFA (copolymer of tetrafluoroethylene and perfluoroalkyl vinyl ether) ion exchange column (inner diameter: 16mm, height: 30cm) (see figure 1 ) was provided with a PFA sieve (bottom), and filled with a mixed bed 50 mL ("ESP-1" manufactured by Organo Corporation, mixed bed Ratio: 1:1). Ultrapure water and carbon dioxide (controlled using a gas mass flow controller) were supplied to the hollow fiber membrane for gas dissolution, and carbon dioxide was dissolved in the ultrapure water to obtain a carbon dioxide aqueous solution. An aqueous carbon dioxide solution was fed to an ion exchange column and passed through an ESP-1 packed bed. The flow rate inside the ion exchange column was set to 1.5 L / h, and the amount of carbon dioxide supplied to the hollow fiber membrane was adjusted so that the conductivity at the inlet of the ion exchange column was 38 μS / cm. The carbon dioxide aqueous solution was continuously passed through the packed bed until the conductivity of the ...

Embodiment 2

[0180]

[0181] The purification test of the hydrogen peroxide solution was carried out using the mixed bed A obtained in Example 1 comprising an anion exchanger and a cation exchanger. A 35% by weight hydrogen peroxide solution having a metal content of 10 ppb was used as a refined target sample. The hydrogen peroxide solution was passed through the mixed bed A in downward direction at a flow rate of 0.5 L / h for 4 hours at a temperature of 5°C. The hydrogen peroxide solution flowing out from the lower part of the packed column was collected and analyzed for metal content using the ICP-MS method. The results are shown in Table 2.

[0182] [Table 2]

[0183]

Embodiment 3

[0185] PFA (copolymer of tetrafluoroethylene and perfluoroalkyl vinyl ether) ion exchange column (inner diameter: 16mm, height: 30cm) (see figure 1 ) was provided with a PFA mesh (bottom) and filled with 50 mL of a strongly basic type I anion exchanger ("ESG4002" manufactured by Organo Corporation, OH form). Ultrapure water and carbon dioxide (controlled using a gas mass flow controller) were supplied to the hollow fiber membrane for gas dissolution, and carbon dioxide was dissolved in the ultrapure water to obtain a carbon dioxide aqueous solution. An aqueous carbon dioxide solution was fed to an ion exchange column and passed through an ESG4002 packed bed. The flow rate inside the ion exchange column was set to 3.0 L / h, and the amount of carbon dioxide supplied to the hollow fiber membrane was adjusted so that the conductivity at the inlet of the ion exchange column was 38 μS / cm. An aqueous carbon dioxide solution was continuously passed through the packed bed until the co...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle sizeaaaaaaaaaa
particle diameteraaaaaaaaaa
particle diameteraaaaaaaaaa
Login to View More

Abstract

A process for producing a mixture of an anion exchanger and a cation exchanger, characterized by including an anion-exchanger conversion step (1) in which an aqueous carbon dioxide solution obtained by dissolving carbon dioxide gas in pure water or ultrapure water is brought into contact with a mixture of an anion exchanger (B) and a cation exchanger to thereby convert the anion exchanger (B) to an anion exchanger (A) having a bicarbonate ion form or having both a bicarbonate ion form and a carbonate ion form and obtain a mixture of the anion exchanger (A) and the cation exchanger. According to the invention, it is possible to convert the anion exchanger of a mixture of an anion exchanger and a cation exchanger to the bicarbonate ion form or to both the bicarbonate ion form and the carbonate ion form, while maintaining the mixture state.

Description

technical field [0001] The invention relates to anion exchangers, mixtures comprising anion exchangers and cation exchangers (anion exchanger-cation exchanger mixtures), mixed beds comprising anion exchangers and cation exchangers (anion exchanger-cation exchanger mixed beds) , their production method, and the refining method of hydrogen peroxide solution. Background technique [0002] Hydrogen peroxide solutions are widely used in various fields (ie, bleaching agent for paper / wood pulp, oxidizing agent for industrial use, waste water treatment, and cleaning agent for semiconductor production process). In the field of wet cleaning processes performed during semiconductor production processes, a large amount of hydrogen peroxide solution is used in the ammonia-hydrogen peroxide solution (RCA:SC-1) cleaning process to remove particulate contamination, and to ionize and remove metal contamination hydrochloric acid-hydrogen peroxide solution (RCA: SC-2) cleaning process, etc. ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C01B15/013B01J41/12B01J47/04
CPCC01B15/0135B01J47/02B01J47/04
Inventor 高桥一重伊藤美和
Owner ORGANO CORP
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com