A large-area low-temperature plasma generator

Abstract

The invention discloses a large-area low-temperature plasma generation device. The device structurally comprises a control circuit, a high voltage power supply, an impedance matcher, an insulated handle, a high voltage female joint, a high voltage electrode and a to-be-treated object; wherein an output port negative pole of the high voltage power supply is grounded, and an output port positive pole of the high voltage power supply is connected with an input end of the impedance matcher; an output end of the impedance matcher is connected with one end of the high voltage female joint in the insulated handle by a high voltage wire; the other end of the high voltage female joint is connected with the high voltage electrode; the control circuit is arranged between the high voltage power supply and the Mains supply. The large-area low-temperature plasma generation device has the advantages that 1, the whole device structure is compact, the device cost is controllable, the fault rate is low, the working stability is high, and the operation is flexible and safe; 2, different treatment requirements can be met, and large-area plasma treatment is realized; 3 low-temperature plasma can be produced in an indoor open environment.

Description

technical field [0001] The invention relates to a large-area low-temperature plasma generating device, which belongs to the field of plasma technology. Background technique [0002] The electrons, ions, excited particles and free radicals rich in the low-temperature plasma discharge space are extremely active chemical reactants. These active particles help to realize some chemical reactions that are difficult to occur under normal conditions, so low-temperature plasma It has been widely used in material surface treatment, waste water and waste gas treatment, disinfection and medical auxiliary treatment, etc.; however, on the one hand, gas discharge plasma works in a strong electric field environment, in order to ensure the safe operation of the device, it must cooperate with complex insulation and grounding system; on the other hand, limited by the principle of gas discharge and the short life of active particles in space, especially the low-temperature plasma working in an ...

AI Technical Summary

Problems solved by technology

[0004] At present, there are three main ways to generate low-temperature plasma in a large area: the first method is to add a barrier medium between two metal electrodes to form a dielectric barrier discharge, and the surface of the capacitive barrier medium can effectively accumulate charges during discharge to form The reverse electric field suppresses the growth of the discharge current, thereby forming a large-area filamentary discharge in the discharge air gap space. As described in the patent CN 203015262 U, introducing an induced gas between the discharge air gaps can produce uniformly diffused low temperature Plasma, the generated plasma contains a large number of metastable nitrogen molecules, hydroxyl groups and oxygen atoms, which can be used for surface modification and disinfection of material materials, but the fixed electrode structure and narrow discharge space The size requirements are high, the applicability is not strong, and the flexibility is not high

The second method adopts the method of combining electrodes, which can be combined according to different requirements to produce low-temperature plasmas of different areas and shapes. As described in the patent CN 102307425 A, different numbers of discharge electrodes are added according to different requirements , so that the discharge channel increases, and the discharge power and transmission charge are also increased accordingly. Compared with the first method, the flexibility of the combined electrode has been improved, but the problem of narrow discharge space caused by the discharge mechanism has not been solved. , which cannot be applied to the material surface treatment of complex three-dimensional objects

In the third method, the plasma generated by the high-voltage electric field is taken out of the discharge area by using the flow field of the air flow, so as to realize the separation of the working area and the discharge space, and form an atmospheric pressure plasma jet; as described in the patent CN 103945627 A, due to the single The area of ​​the jet is small. Some researchers have superimposed multiple jets in parallel to form a plasma jet array to increase the discharge power and transfer charges, and increase the processing area of ​​the plasma. More importantly, the plasma jet array can handle complex three-dimensional objects. However, it is difficult to achieve large-area uniform low-temperature plasma due to the inconsistency of the barrier medium parameters, gas flow distribution and electric field distribution of each jet unit.

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