Zinc arsenide production equipment

Abstract

The invention relates to zinc arsenide production equipment, which includes an electric heating system, an internal furnace (2) that can be placed in the heating system, a vacuum pumping system (3) and an atmosphere protection system (4) that are connected to the internal furnace, and a zinc arsenide collector (5) covering the top of the internal furnace. The internal furnace is made of steel doped with high thermal conductivity metals, and the internal furnace is subjected to carburizing treatment and surface boronizing treatment. The steel doped with high thermal conductivity metals is obtained by: mixing iron powder, copper powder, silver powder and carbon powder evenly in proportion, then putting the mixture into an intermediate frequency furnace to perform heating to melting, pouring the molten metals into a mold, adding a defoaming agent, and performing cooling. Specifically, the iron powder, copper powder, silver powder and carbon powder are in a mass ratio of 1:0.4:0.32:0.15-1:0.57:0.51:0.3; and the high thermal conductivity metals are metals with thermal conductivity of not less than 150 kilocalorie / m.h.DEG C, and include silver and copper. The equipment provided by the invention can complete synthesis and vacuum separation of zinc arsenide at one time, the synthesized zinc arsenide has high purity, and the equipment has the advantages of high yield, low production cost, long service life, and easy detection and maintenance.

Description

technical field [0001] The invention belongs to the technical field of equipment for producing zinc arsenide. Background technique [0002] Arsane (AsH 3 ) is an indispensable basic material for the production of GaAs and GaAsP, as well as N-type silicon epitaxy, diffusion, ion implantation doping, etc. Due to its high purity requirements and difficult purification, the requirements for zinc arsenide, the raw material for arsenic production, are relatively high. High, mainly reflected in the As in zinc arsenide used in the production of high-purity arsenic 2 Zn 3 The main content requirements are higher. The traditional equipment for producing zinc arsenide is electric heating synthesis equipment and vacuum separation equipment. This kind of equipment adopts intermittent operation mode, the production time is long, the purity of the prepared zinc arsenide is not high, the output is low, and the life of the furnace body is short. Contents of the invention [0003] The p...

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Problems solved by technology

The traditional equipment for producing zinc arsenide is electric heating synthesis equipment and vacuum separation equipment. This kind of equipment adopts intermittent operation mode, the production time is long, the purity of the prepared zinc arsenide is not high, the output is low, and the life of the furnace body is short.

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