Polycrystalline diamond water-based polishing solution and preparation method thereof

A polycrystalline diamond and polishing liquid technology, applied in polishing compositions containing abrasives, etc., can solve the problems of poor stability of the polishing liquid system, affecting the polishing effect, restricting the application of diamond polishing liquid, etc., and achieves good dispersion stability and low Rough and smooth effect

Inactive Publication Date: 2016-11-23
天津诺邦科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Nano-diamond particles are easy to spontaneously agglomerate, resulting in poor stability of the polish

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] The polycrystalline diamond powder with a particle size of 100nm and a purity of more than 99.9% obtained by precise classification is subjected to surface modification treatment with a surface modification wetting agent; the suspension is prepared according to the weight percentage of each raw material: water 95%, 2% suspending agent, 1% suspending aid, 0.3% surfactant, 0.2% defoamer, 1% chelating agent, mix evenly, add 0.5% preservative, adjust pH value to 8.5 with pH regulator, and prepare suspension liquid; corresponding to the percentage by weight of each raw material to prepare a polishing liquid: self-made suspension 99.6%, add 0.4% of modified diamond micropowder, ultrasonically disperse, and obtain a polishing liquid with a diamond content of 0.4%.

[0024] The surface modification wetting agent is lactic acid; the suspending agent is carboxymethyl cellulose; the suspending aid is ethylene glycol; the surfactant is fatty alcohol polyoxyethylene ether; The defoa...

Embodiment 2

[0027] The polycrystalline diamond powder with a particle size of 100nm and a purity of more than 99.9% obtained by precise classification is subjected to surface modification treatment with hydroxycarboxylic acid; a suspension is prepared corresponding to the weight percentage of each raw material: water 96.5%, suspending agent 1 %, suspending aid 0.5%, surfactant 0.3%, defoamer 0.2%, chelating agent 1%, mix well, add preservative 0.5% to prepare suspension, pH adjuster to adjust the pH value to 8.5; corresponding to each raw material The percentage by weight is used to prepare the polishing solution: take 99.6% of the self-made suspension, add 0.4% of the modified diamond powder, and disperse it ultrasonically to obtain a polishing solution with a diamond content of 0.4%.

[0028] The surface modification wetting agent is tartaric acid; the suspending agent is carboxymethyl cellulose; the suspending aid is glycerol; the surfactant is nonylphenol polyoxyethylene ether; The de...

Embodiment 3

[0031] The polycrystalline diamond powder with a particle size of 100nm and a purity of more than 99.9% obtained by precise classification is subjected to surface modification treatment with hydroxycarboxylic acid; a suspension is prepared corresponding to the weight percentage of each raw material: water 95%, suspending agent 1.5 %, suspending aid 1%, surfactant 0.3%, defoamer 0.5%, chelating agent 2%, mix well, add preservative 0.2% to prepare suspension, pH adjuster to adjust the pH value to 8.5; corresponding to each raw material The percentage by weight is used to prepare the polishing solution: take 99.6% of the self-made suspension, add 0.4% of the modified diamond powder, and disperse it ultrasonically to obtain a polishing solution with a diamond content of 0.4%.

[0032] The surface modification wetting agent is malic acid; the suspending agent is carboxymethyl cellulose; the suspending aid is ethylene glycol; the surfactant is polyethylene glycol; The antifoaming ag...

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PUM

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Abstract

The invention discloses a polycrystalline diamond water-based polishing liquid and a preparation method thereof. The polishing liquid contains the following components: special diamond micropowder and the corresponding special suspension liquid. The feature of the present invention is, at first carry out surface wetting and modification to diamond with modifier, then add self-made corresponding special suspension and polish under corresponding polishing process conditions, polycrystalline diamond polishing liquid of the present invention, It can realize high-precision machining on the surface of hard materials such as cemented carbide, ceramics, sapphire, glass, etc. It has the advantages of good stability, high polishing rate, low roughness, and long service life.

Description

technical field [0001] The invention belongs to the technical field of surface ultra-fine polishing, and more specifically relates to a polycrystalline diamond water-based polishing liquid and a preparation method thereof. Background technique [0002] Chemical Mechanical Polishing (CMP) is the practical technology and core to achieve the surface planarization of hard materials, and the polishing liquid is an important factor in the polishing technology, and its performance directly affects the surface quality of the polished material. With the development of precision processing industry, diamond polishing fluid has developed rapidly in recent years. Diamond polishing liquid is an ideal abrasive liquid for polishing hard materials such as cemented carbide, ceramics, sapphire, and glass. The polishing efficiency of diamond polishing liquid is several times higher than that of silica sol and other polishing liquids, and the surface roughness can be significantly reduced; whi...

Claims

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Application Information

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IPC IPC(8): C09G1/02
Inventor 董云娜
Owner 天津诺邦科技有限公司
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