MEMS device, method for manufacturing MEMS device, and electronic device
A technology for electronic devices and devices, applied in the field of MEMS devices and their preparation, can solve problems such as device damage, and achieve the effects of suppressing damage, protecting devices, and improving yield
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[0040] The current preparation methods of MEMS devices are as follows Figure 1a-1e As shown, the method will be further described below with reference to the accompanying drawings. First, a semiconductor substrate 101 is provided, and a MEMS device 103, such as a diaphragm or a sensing film, is formed on the semiconductor substrate 101, to obtain Figure 1a The pattern shown.
[0041] Next, a sacrificial material layer 102 is formed on the semiconductor substrate and patterned to expose a part of the semiconductor substrate to form a stepped pattern to obtain Figure 1b The pattern shown.
[0042] A functional material layer 104 is deposited to cover the semiconductor substrate and the sacrificial material layer 102 to obtain Figure 1b The pattern shown.
[0043] A spacer 105 is formed on the side wall of the functional material layer 104 to obtain Figure 1c The pattern shown.
[0044] A metal layer 106 is formed on the sidewalls of the functional material layer 104 and the spacer 10...
Example Embodiment
[0048] Example 1
[0049] The present invention also provides a method for preparing the MEMS device, which is combined with Figure 2a-2g To further explain the method, the 2a-2g are schematic diagrams of the manufacturing process of the MEMS device in this embodiment.
[0050] First, step 201 is performed to provide a semiconductor substrate 201 on which a sacrificial layer 202 partially covering the semiconductor substrate 201 is formed to form a stepped structure.
[0051] Specifically, such as Figure 2a As shown, in this step, the semiconductor substrate 201 may be at least one of the following materials: silicon, silicon-on-insulator (SOI), silicon-on-insulator (SSOI), germanium-on-insulator Silicon (S-SiGeOI), silicon germanium on insulator (SiGeOI), germanium on insulator (GeOI), etc.
[0052] A MEMS element 203 is formed on the semiconductor substrate 201, wherein the MEMS element 203 can be selected according to the type of the MEMS device, for example, it can be a diaphrag...
Example Embodiment
[0083] Example 2
[0084] The present invention also provides a MEMS device, which is prepared by using the method described in Embodiment 1. The semiconductor device prepared by the method described in Example 1 of the present invention can improve the thin film composite layer, so that the metal at the corners of the device has no cracks, and can resist the corrosion of wet chemical etchant (Wet Chemical) at a low level, protect the device, and further improve The performance and yield of the MEMS device are improved.
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