NbBN composite coating and preparation method thereof

A technology of composite coating and B target, applied in the direction of coating, metal material coating process, ion implantation plating, etc.

Inactive Publication Date: 2016-12-07
JIANGSU UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, until now there are almost few research reports on NbBN composite thin coatings

Method used

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  • NbBN composite coating and preparation method thereof
  • NbBN composite coating and preparation method thereof
  • NbBN composite coating and preparation method thereof

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preparation example Construction

[0019] A preparation method of NbBN composite coating, the steps are as follows:

[0020] (1) The cemented carbide or ceramics used as the substrate is ultrasonically cleaned for 15 minutes with water, acetone, and absolute ethanol successively, dried and fixed on the rotatable substrate stage of the sputtering chamber, and the sample baffle is closed;

[0021] (2) Nb targets and B targets with a purity of 99.9% are respectively fixed on the radio frequency gun;

[0022] (3) Pump the air pressure of the sputtering chamber to 6.0×10 -4 Below Pa;

[0023] (4) Passing into the argon gas with a purity of 99.999%, the flow control is 10 sccm, and the sputtering chamber pressure is maintained at 0.25 Pa;

[0024] (5) Adjust the power of Nb target and B target to 60W, and sputter for 10 minutes to clean various impurities on the surface of the target;

[0025] (6) Adjust the power of the Nb target to 200W, close the B target, open the sample baffle, keep the sample rotation speed ...

Embodiment 1

[0029] Change the B target power, when the B target power is 0W, the Nb component is 58.92at.%, the B component is 0at.%, the N component is 39.8at.%, and the O component is 1.28at.%. The microhardness is 20.39GPa , the elastic modulus is 297.93GPa, the self-corrosion voltage is -0.386V, and the self-corrosion current density is 1.13×10 -6 A / cm 2 , The wear at room temperature is 1.88×10 -7 mm -3 N -1 mm -1 、The wear rate at 350℃ is 8.89×10 -7 mm -3 N -1 mm -1 、The wear rate at 500℃ is 1.11×10 -6 mm -3 N -1 mm -1 .

Embodiment 2

[0031] When the B target power is 20W, the Nb component is 57.53at.%, the B component is 1.57at.%, the N component is 40.19at.%, and the O component is 1.71at.%. The microhardness is 21.5GPa, and the elastic modulus is 301.7GPa, self-corrosion voltage of -0.365V, self-corrosion current density of 8.95×10 -7 A / cm 2 , The wear at room temperature is 1.31×10 -7 mm -3 N -1 mm -1 、The wear rate at 350℃ is 6.67×10 -7 mm -3 N -1 mm-1 、The wear rate at 500℃ is 7.22×10 -7 mm -3 N -1 mm -1 .

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Abstract

The invention discloses a NbBN composite coating and a preparation method thereof. The NbBN composite coating is prepared by sputtering on a cemented carbide or ceramic substrate at a room temperature according to a double-target confocal radio-frequency reactive magnetron sputtering method, is 1.5 to 2.5 [mu]m thick, and comprises 0 to 9.65 at.% of the B component, 49.43 to 58.92 at.% of the Nb component, 39.8 to 41.2 at.% of the N component, and the balance of O. According to the NbBN composite coating and the preparation method, the mechanical properties, the corrosion resistance and the wear resistance of a NbN coating are further improved; and the NbBN composite coating is a protective coating with excellent overall properties, so as to be applied to the fields of high speed, dry cutting, corrosion protection and the like more widely.

Description

technical field [0001] The invention relates to a composite coating, in particular to a high-hardness, corrosion-resistant and wear-resistant NbBN composite coating and a preparation method thereof, belonging to the technical field of ceramic coatings. Background technique [0002] In the initial research on NbN thin coatings, what attracted the attention of researchers was not its mechanical properties, but its superconducting properties. The main research direction was to increase the superconducting transition temperature of NbN. Subsequently, because NbN has good thermal expansion matching with most cutting tools, people try to apply it in the field of anti-wear. Its good chemical inertness, wear resistance, high melting point, high stable temperature and high electrical conductivity make NbN thin coatings successfully applied in protective coatings, field emission cathode materials, diffusion barriers, etc. In addition, under suitable process parameters, NbN also exhib...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35
CPCC23C14/0641C23C14/0036C23C14/352
Inventor 喻利花许俊华陈建
Owner JIANGSU UNIV OF SCI & TECH
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