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High-hardness CrAlN coating layer containing multiphase AlCrN nanometer insertion layer and preparation method thereof

A high-hardness, intercalated layer technology, applied in the field of materials science, can solve the problems of hardness, oxidation resistance, deposition conditions and deposition efficiency, and achieve the effect of improving hardness and life

Active Publication Date: 2016-12-07
UNIV OF SHANGHAI FOR SCI & TECH
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Problems solved by technology

[0016] Aiming at the above technical problems in the prior art, the invention provides a high-hardness CrAlN coating containing a multi-phase AlCrN nano-insertion layer and a preparation method thereof, and the high-hardness CrAlN coating and its preparation method to be solved The technical problem that the hard protective coating in the prior art cannot balance hardness, oxidation resistance, deposition conditions and deposition efficiency

Method used

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  • High-hardness CrAlN coating layer containing multiphase AlCrN nanometer insertion layer and preparation method thereof
  • High-hardness CrAlN coating layer containing multiphase AlCrN nanometer insertion layer and preparation method thereof

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preparation example Construction

[0031] Preparation, characterization and measuring instruments used in the present invention:

[0032] JGP-450 Magnetron Sputtering System, Shenyang Scientific Instrument Development Center Co., Ltd., Chinese Academy of Sciences

[0033] D8 Advance X-ray diffractometer, Bruker, Germany

[0034] NANO Indenter G200 nanoindenter, Agilent Technologies, USA

[0035] Tecnai G 2 Model 20 high-resolution transmission electron microscope, FEI, USA

[0036] Quanta FEG450 scanning electron microscope, American FEI company

Embodiment 1

[0038] Using Cr 50 al 50 (50 atom%:50 atom%) composite target and Al 80 Cr 20 (80 atom%:20 atom%) composite target with a diameter of 75mm;

[0039] Ar gas flow: 38sccm, N 2 Air flow: 5sccm; target base distance 3-7cm, total air pressure range 0.6Pa.

[0040] Cr 50 al 50 N-layer sputtering power DC 120W, time 12s; heterogeneous Al 80 Cr 20 N-layer sputtering power radio frequency 80W, time 2s;

[0041] After testing, the obtained Cr 50 al 50 N layer thickness is 4.0nm, heterogeneous Al 80 Cr 20 The thickness of the N layer is 0.3 nm, the total thickness is 1.8 μm, and the hardness is 35.4 GPa.

Embodiment 2

[0043] Using Cr 50 al 50 (50 atom%:50 atom%) composite target and Al 80 Cr 20(80 atom%:20 atom%) composite target with a diameter of 75mm;

[0044] Ar gas flow is 38sccm, N 2 The air flow rate is 5sccm; the target base distance is 3-7cm, and the total air pressure is 0.6Pa;

[0045] Cr 50 Al 50 N-layer sputtering power DC 120W, time 15s; heterogeneous Al 80 Cr 20 N layer sputtering power radio frequency 80W, time 3s.

[0046] After testing, the obtained Cr 50 Al 50 N layer thickness is 5.0nm, heterogeneous Al 80 Cr 20 The thickness of the N layer is 0.4 nm, the total thickness is 2.1 μm, and the hardness is 36.1 GPa.

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Abstract

The invention discloses a high-hardness CrAlN coating layer containing a multiphase AlCrN nanometer insertion layer. Cr50Al50N layers and Al80Cr20N layers are alternately deposited on a basal body; each Cr50Al50N is 4.0-6.0 nm thick; each multiphase Al80Cr20N is 0.3-1.4 nm thick; and the total thickness of the coating layer is 1.5-2.8 microns. The invention further provides a preparation method of the coating layer; firstly, the surface of the basal body is polished for ultrasonic cleaning and ion cleaning; and then, a reaction sputtering method is adopted to alternately deposit the multiphase Al80Cr20N layers and the Cr50Al50N layers on the basal body. As the CrAlN coating layer still can keep high hardness, high wear resistance and high-temperature oxidation resistance under high-speed cutting, the CrAlN coating layer can serve as a high-speed cutting tool and other protective coating layers for wear resisting workpieces under high-temperature conditions.

Description

technical field [0001] The invention belongs to the field of materials science, and relates to a hard protective coating, in particular to a high-hardness CrAlN coating containing a multi-phase AlCrN nano-intercalation layer and a preparation method thereof. Background technique [0002] With the progress of society and the development of science and technology, the requirements for surface properties of materials are getting higher and higher. Various indicators such as high hardness, wear resistance, corrosion resistance, and high temperature resistance are important indicators to measure the performance of today's cutting tools. For this reason, people have developed a coated tool, that is, by coating a layer of metal compound with excellent performance on the surface of the tool by chemical or physical methods, giving the tool better comprehensive performance. [0003] Tool coatings have developed from the initial TiC, TiN to Ti, N, etc. as basic elements, multi-layer ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35C23C28/04
CPCC23C14/0036C23C14/0084C23C14/0641C23C14/352C23C28/044C23C28/048
Inventor 李伟刘平杜浩明张柯马凤仓刘新宽陈小红何代华
Owner UNIV OF SHANGHAI FOR SCI & TECH
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