Carbon substrate surface TaC coating layer and preparation method thereof
A carbon substrate and coating technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of complex coating composition, easy cracking of the coating, affecting the protection of the substrate, etc., to achieve outstanding thermal stability, combined with The effect of high strength and high bond strength
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[0032] Example 1:
[0033] A TaC coating on the surface of a carbon substrate of the present invention includes TaC formed in situ by a hybrid complex containing Ta and C and carbon of the carbon substrate, and TaC formed by decomposition of the hybrid complex containing Ta and C.
[0034] In this embodiment, the hybrid complex containing Ta and C is Ta(O)C, and the carbon matrix is graphite material.
[0035] In this embodiment, the average grain size of the TaC coating on the surface of the carbon substrate is 10 μm, and the average thickness is 50 μm.
[0036] The preparation method of the TaC coating on the surface of the carbon substrate of this embodiment includes the following steps:
[0037] (1) Synthesis of TaC precursor: TaCl 5 Is the tantalum source, the first solvent is the mixture of acetylacetone (chelating agent) and methanol, TaCl 5 The molar ratio of acetylacetone:methanol is 1:2:60, the precursor sol is obtained by stirring at 40℃ for 12h; then the solvothermal react...
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[0043] Example 2
[0044] A TaC coating on the surface of a carbon substrate of the present invention includes TaC formed in situ by a hybrid complex containing Ta and C and carbon of the carbon substrate, and TaC formed by decomposition of the hybrid complex containing Ta and C.
[0045] In this embodiment, the hybrid complex containing Ta and C is Ta(O)C, and the carbon matrix is graphite material.
[0046] In this embodiment, the average grain size of the TaC coating on the surface of the carbon substrate is 15 μm, and the average thickness is 90 μm.
[0047] The preparation method of the TaC coating on the surface of the carbon substrate of this embodiment includes the following steps:
[0048] (1) Synthesis of TaC precursor: TaCl 5 Is the tantalum source, the first solvent is the mixture of acetylacetone (chelating agent) and methanol, TaCl 5 The molar ratio of acetylacetone:methanol is 1:5:80, the precursor sol is obtained by stirring at 50℃ for 12h; then the solvothermal reacti...
Example Embodiment
[0053] Example 3
[0054] A TaC coating on the surface of a carbon substrate of the present invention includes TaC formed in situ by a hybrid complex containing Ta and C and carbon of the carbon substrate, and TaC formed by decomposition of the hybrid complex containing Ta and C.
[0055] In this embodiment, the hybrid complex containing Ta and C is Ta(O)C, and the carbon matrix is a C / C composite material.
[0056] In this embodiment, the average grain size of the TaC coating is 10 μm and the average thickness is 40 μm.
[0057] The preparation method of the TaC coating on the surface of the carbon substrate in this embodiment is basically the same as that in Embodiment 1, except that the carbon substrate in this embodiment is a C / C composite material.
[0058] The TaC coating prepared in this embodiment has golden metallic luster, good TaC crystallinity, no other impurity phases, no preferential orientation, and the average thickness of the coating is 40μm. The TaC coating and the c...
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