Flexible pressure sensor and preparation method thereof

Abstract

The invention provides a flexible pressure sensor. The flexible pressure sensor comprises a flexible substrate, a flexible upper cover and electrodes arranged between the flexible substrate and the flexible upper cover at intervals. A circuit with semiconductor resistors and conductive channels is arranged between the electrodes. The micro-nano processing technology is combined with the modern printing electronic technology, so the Wheatstone bridge type pressure sensor can be built on the pure flexible substrate, the defects that the process of a technology for preparing a hard substrate (like silicon) pressure sensor through a traditional semiconductor technology is complex, and influences of the high-temperature technology are large are avoided, and integrated preparation of the flexible sensor is achieved. The micro-nano processing technology, the modern printing electronic technology, nano-carbon materials, polymer materials and the like are combined, so the flexible pressure sensor of a Wheatstone bridge structure is prepared on the flexible substrate, and the pressure sensor is simple in preparation process, low in cost, good in performance and suitable for large-scale production.

Description

technical field [0001] The invention relates to a flexible pressure sensor and a preparation method thereof, belonging to the technical field of semiconductors. Background technique [0002] Since the 1980s, sensors based on micro-electro-mechanical system (Micro-Electro-Mechanical System, MEMS) technology have been developed very rapidly. Compared with traditional sensors, MEMS sensors have the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and intelligentization. At the same time, the feature size on the order of microns enables it to complete some functions that cannot be realized by traditional mechanical sensors. [0003] Among them, the MEMS pressure sensor is the earliest micro-electro-mechanical system product to be developed, and it is also the most mature and the earliest product to start industrialization in micro-electro-mechanical technology. From the perspective of...

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Problems solved by technology

Although this patent realizes the preparation of flexible sensors on flexible substrates, due to the characteristics of easy agglomeration of carbon nanotubes, they have defects such as poor controllability, low repeatability, and poor stability as a sensitive material alone.

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