TiAlSiN-AlTiN composite coating and preparation process thereof

Abstract

The invention relates to a TiAlSiN-AlTiN composite coating and a preparation process thereof. According to the TiAlSiN-AlTiN composite coating, a substrate is pre-treated, the pre-treated substrate is placed into electric arc and magnetron sputtering composite film plating equipment, a circular arc Ti target is adopted as a Ti source, the sputtering rate of the circular Ti target is controlled through a circular arc power supply current, a circular arc AlTi target is adopted as an AlTiN coating corresponding element source, the atom ratio of Al to Ti (Al/Ti) is 67/33, an AlTiSi target is adopted as a TiAlSiN coating corresponding element source, and the atom ratio of Al to Ti to Si (Al/Ti/Si) is 60/30/10; 12 pairs of the circular arc sources are spirally arranged on the periphery of the wall of a vacuum cavity, and by adjusting the power of a medium frequency pulse power supply to control the sputtering rate of the target, based on different coatings, the background vacuum is 5*-<3>pa before the coating, and the rotating is the 3-dimensional rotating at a speed of 2 r/min; high-purity Ar is adopted as a main ionization gas so as to ensure an effective glow discharge process; high-purity N2 is adopted as a reaction gas and is ionized, and the ionized N2 is combined with Ti, Si and Al so as to deposit on the substrate surface and form the TiAlSiN-AlTiN composite coating; and the prepared TiAlSiN-AlTiN coating has the thickness of about 3.5 [mu]m, the microhardness of 24.5 GPa, and high hardness.

Description

technical field [0001] The invention belongs to the field of coating material preparation, and further relates to a TiAlSiN-AlTiN composite coating and a preparation process. Background technique [0002] In recent years, tool cutting technology is developing towards high-speed (100 m / min) dry cutting, and dry cutting is a processing method that does not use cutting fluid during processing. Dry cutting is not simply to stop using cutting fluid, but to ensure high processing efficiency, high product yield, high tool durability and reliability of cutting process while stopping using cutting fluid, which requires the use of high hardness and excellent performance dry cutting tools. [0003] The hard coating has excellent functions such as high hardness, anti-oxidation, and wear resistance, and has broad application prospects in tool molds and mechanical wear-resistant parts. In the past two decades, hard coatings of two or three components represented by nitrides and carbides...

AI Technical Summary

Problems solved by technology

However, the main disadvantages of magnetron sputtering are that the bonding strength of the coating is not high, the deposition rate is slow, the utilization rate of the target is not high, and it is difficult to meet the surface strengthening requirements of the workpiece under severe service conditions; the second is the arc ion plating deposition technology, arc ion plating Plating has the advantages of high ion energy, high ionization rate, dense mold layer and strong adhesion.

However, arc ion plating coatings tend to contain microscopic sputtering particles, which not only affect the surface roughness, but also destroy the continuity of the coating. In addition, the bias voltage has a significant effect on the substrate temperature and limits the application range of this technology; Plasma-assisted chemical vapor deposition represented by pulsed direct current PCVD is based on chemical vapor deposition. Therefore, the coating has high bonding strength and good comprehensive performance, but the main disadvantage is that the deposition temperature is high. The CI content in the coating cannot be completely eliminated, which affects the corrosion performance and mechanical properties of the coating, but at present, this technology is mainly used in tools and molds of cemented carbide substrates

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