Metal etching solution and etching method for copper/molybdenum film

Abstract

The invention especially discloses a metal etching solution for a copper / molybdenum film, belonging to the technical field of processing of liquid crystal panels. The metal etching solution comprises organic acid, phosphate and hydrogen peroxide and has a pH value of no more than 6. In the metal etching solution provided by the invention, each component can exert multiple effects, so the metal etching solution has the advantages of simpler composition and a wider application scope compared with the prior art; meanwhile, the metal etching solution is free of fluorine and friendly to environment, and poses no damage to the substrates of materials like glass and to special materials like IGZO; and since the metal etching solution has good homogeneity, the critical sizes of a cone angle and the like formed in the process of etching can be perfectly controlled. The invention also provides an etching method for treating the copper / molybdenum film based on the metal etching solution.

Description

technical field [0001] The invention belongs to the technical field of liquid crystal panel processing, and in particular relates to a metal etchant for copper / molybdenum film layers in a liquid crystal panel and an etching method thereof. Background technique [0002] The production process of liquid crystal panels generally includes a series of processes such as cleaning-film formation (generally physical vapor deposition / chemical vapor deposition)-exposure-development-etching (generally wet etching / dry etching)-stripping-inspection. Among them, the effect of wet etching has a great influence on the fineness of the wiring and the quality of the final liquid crystal panel. [0003] The material of the metal wiring in the traditional liquid crystal display device is mostly aluminum or aluminum alloy, and the corresponding metal etchant is generally a mixture of inorganic acids. With the development of display technology, especially toward the development of large-scale and ...

AI Technical Summary

Problems solved by technology

There are many types of reagents, and the ingredients are relatively complex. Correspondingly, the cost of raw materials is higher, and the preparation process is more cumbersome

[0005] Although there are also newly developed metal etching solutions suitable for copper wiring, there are still problems of complex components, which lead to high cost and cumbersome preparation

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