Method for cubic boron nitride micro-powder particle surface metallization modifying
A technology of cubic boron nitride micropowder and boron nitride micropowder, which is applied in metal material coating technology, ion implantation plating, coating, etc., can solve problems limited to surface metallization modification by chemical methods, and achieve Improve thermal stability and chemical stability, environmental friendliness, good effect
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Embodiment 1
[0033] The surface metallization modification method and process flow of cubic boron nitride micropowder particles in the embodiment of the present invention are as follows:
[0034] 1. Coating Mo film on the surface of cubic boron nitride micropowder particles by magnetron sputtering method: 600 grams such as figure 1 The cubic boron nitride micropowder with a particle size of ≤3.0μm is cleaned first, and then put into the drum deposition table of the coating machine, and the Mo target is loaded on the cathode target, because the metal Mo is a weak magnetic conductor, so Select DC power. Pre-pump the background vacuum to 3.0×10 -3 Below Pa, enter the working gas Ar gas, and set the coating parameters: the sputtering pressure is maintained at 0.3-0.8Pa, the sample heating temperature is 100°C, and the target power density is 20W / cm 2 , the rotational speed of the drum-type deposition table is set at 15-20r / min, the vibration frequency of the vibration system is 35Hz, and the...
Embodiment 2
[0039] The surface metallization modification method and process flow of cubic boron nitride micropowder particles in the embodiment of the present invention are as follows:
[0040] 1. Coating W film on the surface of cubic boron nitride micropowder particles by magnetron sputtering method: 1500 grams of purchased cubic boron nitride micropowder with a particle size of ≤3.0 μm is firstly cleaned on the surface of the particles, and then put into the drum deposition table of the coating machine , Put the W target on the cathode target, because the metal W is a weak magnetic conductor, so choose a DC power supply. Pre-pump the background vacuum to 3.0×10 -3 Below Pa, enter the working gas Ar gas, and set the coating parameters: the sputtering pressure is maintained at 0.1-0.5Pa, the sample heating temperature is 400°C, and the target power density is 30W / cm 2 , the rotational speed of the drum-type deposition table is set at 40-50r / min, the vibration frequency of the vibration...
Embodiment 3
[0045] The surface metallization modification method and process flow of cubic boron nitride micropowder particles in the embodiment of the present invention are as follows:
[0046] 1. Coating Mo-Co alloy film on the surface of cubic boron nitride micropowder particles by magnetron sputtering method: 1500 grams of purchased cubic boron nitride micropowder with a particle size of ≤3.0 μm is firstly cleaned on the surface of the particles, and then put into the drum of the coating machine In the type deposition table, the Mo target and the Co target are respectively installed on two opposite cathode targets. Since Mo and Co are both magnetic conductors, DC magnetron sputtering is selected for coating. Pre-pump the background vacuum to 3.0×10 -3 Below Pa, enter the working gas Ar gas, and set the magnetron sputtering coating parameters: the air pressure is maintained at 6-10Pa, the sample heating temperature is 300°C, and the Mo target power density is 22W / cm 2 , Co target powe...
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