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Preparation method of high-purity yttrium oxide coating for aluminum alloy parts of ic equipment by explosive spraying

An explosive spraying, yttrium oxide technology, applied in metal material coating process, coating, melting spraying and other directions, can solve the problems of easy oxidation, poor coating quality, large heat input of aluminum alloy sprayed substrates, etc.

Active Publication Date: 2019-05-03
SHENYANG FORTUNE PRECISION EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a kind of explosive spraying technology to prepare the method for the high-purity yttrium oxide coating of aluminum alloy parts of IC equipment, solve the poor coating quality and easy Oxidation, as well as the problem of excessive heat input of the aluminum alloy sprayed substrate, open up a new effective way to prepare high-purity yttrium oxide coatings, in order to expand the scope of practical applications as soon as possible

Method used

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  • Preparation method of high-purity yttrium oxide coating for aluminum alloy parts of ic equipment by explosive spraying
  • Preparation method of high-purity yttrium oxide coating for aluminum alloy parts of ic equipment by explosive spraying
  • Preparation method of high-purity yttrium oxide coating for aluminum alloy parts of ic equipment by explosive spraying

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Explosive spraying experiment:

[0036] (1) Spraying conditions: the spraying gas uses oxygen (O 2 ) and acetylene (C 2 h 2 ), the spraying distance is 100mm, the flow ratio of oxygen and acetylene is 2:1, the gun filling ratio of oxygen and acetylene is 30%, the powder feeding rate is 0.1g / s, and the ignition frequency is 5cycles / s.

[0037] (2) Powder for spraying: the high-purity yttrium oxide powder used is commercial yttrium oxide powder sold on the market, and its chemical composition is: yttrium oxide≧99.9%. The particle size distribution is: particle size 45 μm.

[0038] (3) Substrate: 6061 aluminum alloy, the thickness of the coating after spraying is greater than 100 μm, and the thickness of the coating in this embodiment is about 220 μm.

[0039] XRD analysis showed that the composition of the sprayed coating did not change compared with the original powder. The surface roughness measurement shows that the average roughness of the detonation sprayed coat...

Embodiment 2

[0042] Explosive spraying experiment:

[0043] (1) Spraying conditions:

[0044]

[0045] (2) Powder for spraying: the high-purity yttrium oxide powder used is commercial yttrium oxide powder sold on the market, and its chemical composition is: yttrium oxide≧99.9%. The particle size distribution is: particle size 45 μm.

[0046] (3) Substrate: 6061 aluminum alloy, the thickness of the coating obtained after spraying is greater than 100 μm, and the thickness of the coating in this embodiment is about 200 μm.

[0047] XRD analysis showed that the composition of the sprayed coating did not change compared with the original powder. The surface roughness measurement shows that the average roughness of the detonation sprayed coating on the 6061 aluminum alloy substrate is Ra=9μm;

[0048] As shown in Figure 2(a)-(c), it can be seen from the SEM photos of the surface morphology that the yttrium oxide coating obtained under this process condition is uniform and dense, and there ...

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Abstract

The invention relates to the field of IC equipment key parts, in particular to a method for preparing a high-purity yttrium oxide coating for an IC equipment aluminum alloy part through explosion spraying. The method comprises the following steps that (1) protection of a part coating-free area is carried out; (2) surface pretreatment of a part spraying area is carried out; (3) high-purity yttrium oxide powder is adopted, the purity is larger than or equal to 99.9%, and the average particle size ranges from 2 micrometers to 50 micrometers; and (4) an explosion spraying system is adopted for fast spraying. Compared with traditional thermal spraying, explosion spraying is high in speed and efficiency, thermal input on a matrix can be effectively reduced and lowered to a certain degree, and the method is suitable for spraying the coating to the surface of the IC equipment key part such as aluminum and an aluminum alloy. The method of explosion spraying is adopted, the yttrium oxide coating stable in quality and uniform in thickness is prepared, the coating is compact, resistance to corrosion of high-energy plasma and strong corrosive gas of the IC equipment part is greatly improved, meanwhile, the service life of the part is prolonged, and the preparation efficiency of the part is improved.

Description

technical field [0001] The invention relates to the field of key components of IC equipment, in particular to a method for preparing high-purity yttrium oxide coatings for aluminum alloy components of IC equipment by explosive spraying. Background technique [0002] The inner surface of the dry etching chamber and its parts are in an ionized strong corrosive gas environment, and are subjected to strong bombardment of high physical energy plasma. This is one of the strongest corrosion known in the industry, so the etching chamber The body and its parts must be protected by coating. The corrosive environment of the etching machine gas distribution plate and wafer cover ring is particularly harsh, and must be protected. Because of its wide bandgap, high saturation drift velocity, high critical breakdown field strength, high thermal conductivity, low conductivity constant and ability to work under extreme conditions, yttrium oxide is the most ideal material for strong corrosive...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C4/11C23C4/126
Inventor 沈艳芳冯博华伟刚杨阳吴杰熊天英侯涛李茂程刘伟杰郁忠杰吴敏杰唐伟东
Owner SHENYANG FORTUNE PRECISION EQUIP CO LTD
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