Mass spectrometer and pole used for same

Abstract

The invention relates to a detection analysis device, and particularly to a mass spectrometer and a pole used for the same. The pole comprises a pole body and a film layer; and the film layer is formed on a pole body by adopting a vacuum film plating technology. The vacuum film plating technology has lower cost than the existing complex processing technology. By carrying out film plating processing on the surface of the pole body, the manufacturing deficiency of the pole body can be made up, the pole dimension precision can be improved, the pole is enabled to meet the processing precision requirements such as the cylindricity and the surface roughness, and the pole is enabled to have the characteristics such as good conductivity, good corrosion resistance, good thermal stability, relatively low vacuum air release, relatively low secondary ion effect, difficult surface particle release and pollution resistance. Furthermore, the mass spectrometer using the pole can generate an ideal electric field; and the service lifetime of the pole is prolonged while the detection work is finished; the requirement on the material type of the pole body is reduced, and materials at low cost can be selected. The mass spectrometer comprises the pole, is low in cost, can guarantee generation of the ideal electric field and is long in service lifetime.

Description

technical field [0001] The invention relates to detection and analysis equipment, in particular to a pole rod for a mass spectrometer and a mass spectrometer. Background technique [0002] As an important gas analysis instrument in vacuum measurement and leak detection, quadrupole mass spectrometer has the function of simultaneously analyzing various residual gas components in the space. Therefore, in vacuum leak detection, the quadrupole mass spectrometer can not only perform single-point leak detection on the sealing system filled with different leak-indicating media, but also realize the test of the total leak rate of each sealing system, shortening the time to the maximum extent. Leak detection cycle. [0003] A quadrupole mass spectrometer is mainly composed of three parts: ion source, analyzer and collector. The function of the ion source is to ionize gas molecules, generate positive ions and send them to the analyzer. The analyzer screens the incoming ions and sends...

AI Technical Summary

Problems solved by technology

[0012] The quadrupoles are closely attached to the inner wall of the ceramic ring and are evenly distributed. There are ceramic columns between adjacent quadrupoles. Each ceramic column is tangent to the adjacent quadrupole and the inner wall of the ceramic ring. The ceramic columns and quadrupoles are respectively Using the same size, the processing of ceramic rings, ceramic columns, and quadrupole rods has no complicated curved surfaces, so it is easy to process. However, because there are many interactions between multiple parts and the requirements are high, higher processing and assembly requirements are required. , in addition, due to the lack of firm connections between the quadrupole, the ceramic column and the ceramic ring, the service life will be reduced

[0013] In summary, although the current improvement methods have their own advantages, on the whole, it is impossible to obtain a pole that meets the requirements of cost reduction, high precision, and long life at the same time

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