Palladium-niobium catalyzing film material used for light-adjusting device, light adjusting mirror with material and preparing method of palladium-niobium catalyzing film material

A technology of thin film materials and dimming mirrors, which is applied in metal material coating technology, instruments, optics, etc., can solve problems such as oxidation, poor ductility of Pd, loss of dimming performance, etc., to reduce manufacturing costs and reduce preparation costs , the effect of improving speed

Inactive Publication Date: 2017-05-24
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As the catalytic layer of the dimming mirror, only metal Pd has obvious catalytic effect at room temperature and atmospheric pressure, but the ductility of Pd is not good, so when the film is prone to cracks during the volume expansion and contraction process caused by hydrogen absorption and desorption, resulting in its Oxidation of the covering magnesium alloy film and loss of dimming performance

Method used

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  • Palladium-niobium catalyzing film material used for light-adjusting device, light adjusting mirror with material and preparing method of palladium-niobium catalyzing film material
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  • Palladium-niobium catalyzing film material used for light-adjusting device, light adjusting mirror with material and preparing method of palladium-niobium catalyzing film material

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preparation example Construction

[0035] The palladium-niobium catalytic layer film material is preferably prepared by co-sputtering pure metal Pd and Nb by DC magnetron sputtering. The formation of alloy films with different compositions can be controlled by changing the sputtering power. The thickness of the deposited film is controlled by adjusting the sputtering time to meet the application requirements.

[0036] In the preparation of light-adjusting mirrors, after co-sputtering deposition of light-adjusting layers (such as magnesium alloy films) on the substrate by physical vapor deposition, followed by in-situ co-sputtering deposition of metal palladium and metal niobium to obtain palladium-niobium alloy catalysts layer of thin film material to obtain dimming mirror thin film material. Similarly, the formation of light-adjusting layers and catalytic layers with different components can be controlled by changing the sputtering power, and the thickness of the light-adjusting layers and catalytic layers ca...

Embodiment 1

[0044] Embodiment 1: Preparation of dimming mirror

[0045] 1) Substrate cleaning

[0046] First, put the ordinary BK7 substrate in the beaker, and ultrasonically in 0.5mol / L NaOH solution, deionized water, acetone, and deionized water for 10 minutes respectively;

[0047] 2) Preparation of magnesium alloy dimming mirror

[0048] Magnesium alloy dimming mirror film is prepared by DC magnetron sputtering. The magnetron sputtering apparatus includes a sample chamber and a sputtering chamber. The sputtering chamber contains 4 targets, which are pure Mg metal targets (99.99%) , pure Ni metal (99.99%), pure Pd metal (99.99%) and pure Nb metal targets (99.99%). Send the cleaned BK7 substrate into the sputtering chamber, and the background vacuum of the sputtering chamber reaches 10 -5 Below the order of magnitude, adjust the rotation speed of the sample stage to 10r / min; feed high-purity argon gas with a flow rate of 40sccm, adjust the deposition pressure to 0.5Pa, and start depo...

Embodiment 2

[0050] Embodiment 2: the preparation of palladium niobium catalytic film material

[0051] 1) Substrate cleaning

[0052] First place the Si substrate in a beaker and ultrasonically in acetone for 10 minutes;

[0053] 2) Preparation of palladium-niobium alloy

[0054] The preparation of the palladium-niobium alloy thin film adopts the method of DC magnetron sputtering. The magnetron sputtering apparatus includes a sample chamber and a sputtering chamber. The sputtering chamber contains 4 targets, which are pure Mg metal target (99.99%), pure Ni metal (99.99%), pure Pd metal (99.99%) and pure Nb metal targets (99.99%), only metal Pd and Nb targets are used here. Send the cleaned Si substrate into the sputtering chamber, and the background vacuum of the sputtering chamber reaches 10 -5 Below the order of magnitude, adjust the rotation speed of the sample stage to 10r / min; feed high-purity argon gas with a flow rate of 40sccm, adjust the deposition pressure to 0.5Pa, and start...

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Abstract

The invention relates to a palladium-niobium catalyzing film material used for a light-adjusting device, a light adjusting mirror with material and a preparing method of the palladium-niobium catalyzing film material. The film material is a Pd-Nb alloy film, and the chemical composition of the film material is pd100-xNbx, wherein x is larger than 0 and smaller than 20. Niobium is doped in the palladium catalyzing layer film material and can serve as a protection layer and a catalyzing layer to effectively catalyze pyrolysis of hydrogen under the room-temperature atmosphere, on the premise that the transmittance is not affected, the hydrogenation and dehydrogenation life of the light adjusting mirror can be prolonged, the speed of hydrogenation and dehydrogenation can be increased as well, and in addition, the manufacturing cost of the light adjusting mirror is reduced.

Description

technical field [0001] The invention relates to a palladium-niobium catalytic thin film material for a light-adjusting device, a light-adjusting mirror with the material, and a preparation method thereof. Background technique [0002] In today's society, environmental pollution and energy shortage are becoming more and more serious, and energy conservation and environmental protection are the inevitable requirements for sustainable social development. my country is a big energy-consuming country, and building energy consumption accounts for 34% of the total energy consumption of the society. Compared with developed countries, my country's building energy consumption is large and energy utilization efficiency is low. Glass doors and windows are the main channel for heat exchange between buildings and the outside world, and energy saving of doors and windows is the key to building energy conservation. Traditional Low-E glass has only single cold and warm properties, and cann...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/18G02F1/01
Inventor 包山虎金平实张小丽幸云川
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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