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Laser Doppler tachometer based on ridge-shaped optical waveguides

A Doppler velocimeter and optical waveguide technology, which can be used in instruments, measuring devices, fluid velocity measurement, etc., and can solve the problem of high cost

Active Publication Date: 2017-06-13
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] (3) If the components of the system want to achieve higher precision, the cost is relatively high

Method used

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  • Laser Doppler tachometer based on ridge-shaped optical waveguides
  • Laser Doppler tachometer based on ridge-shaped optical waveguides
  • Laser Doppler tachometer based on ridge-shaped optical waveguides

Examples

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example 1

[0047] refer to Figure 1 to Figure 4 , silicon-on-insulator (SOI) with a silicon thickness of 10 μm on the top layer and a silicon oxide thickness of 2 μm on the insulating layer is selected as the manufacturing material. A laser Doppler velocimeter based on a ridge optical waveguide was obtained by deep ultraviolet exposure and inductively coupled plasma dry etching. Such as Figure 4 As shown, the laser Doppler velocimeter cooperates with the input laser 9, the collimator 10, the single-mode optical fiber 11, the output photodetector 12, and the signal processing circuit 13 to form a real-time blood flow detection system to measure blood flow in the blood vessel 14. blood flow rate.

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Abstract

The invention discloses a laser Doppler tachometer on the basis ridge optical waveguides. The laser Doppler tachometer comprises a beam splitter, a probe and a beam combiner, the beam splitter and the beam combiner are formed based on the ridged optical waveguides, the beam splitter is used for dividing a laser light source into a reference beam and a detecting beam, after the detecting beam is output from an output end of the probe and reaches a detected object, Doppler frequency shift of the detecting beam occurs, scattering light after the frequency shift enters a receiving end of the probe, and after the scattering light is interfered by coupling of the beam combiner and the reference beam, and a signal detected by a photoelectric detector is output. The laser Doppler tachometer can output speed information after transforming the speed information into an optical signal, and therefore perception speed changes can be efficiently coupled with single-model optical fiber, and the laser Doppler tachometer has the advantages of being high in sensitivity, resistant to electromagnetic radiation, easy to process and miniaturize, low in cost, and the like.

Description

technical field [0001] The invention relates to a laser Doppler velocimeter, in particular to a laser Doppler velocimeter based on a ridge optical waveguide. Background technique [0002] In 1842, Austrian physicists discovered the Doppler effect, that is, when there is relative motion between the wave source and the receiver, the frequency of the signal received by the receiver is different from the frequency of the signal sent by the wave source, that is, the relative motion between the two produces frequency shift phenomenon. In 1905, Einstein proved that the Doppler effect also exists in light waves, which provided a theoretical basis for the invention of the laser Doppler velocimeter. In 1960, the emergence of lasers as a new light source gave a huge impetus to the emergence of Doppler velocimeters. In 1964, Ye and Cummings successfully measured the flow distribution of laminar flow using a laser current meter, and since then created the laser Doppler velocity measure...

Claims

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Application Information

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IPC IPC(8): G01P5/26
CPCG01P5/26
Inventor 王晓浩王玺董瑛陈廷钱翔
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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