A kind of high hardness alcrn nanocomposite coating and its preparation technology
A preparation process and high hardness technology, applied in metal material coating process, coating, vacuum evaporation plating and other directions, can solve the problems of reducing the mechanical properties such as hardness and elastic modulus of the coating, and achieve good wear resistance, The effect of wide application range and low coefficient of friction
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Embodiment 1
[0018] In this embodiment, an AlCrN nano-composite coating is deposited on a polished high-speed steel sheet, and the sample size is 25×30×1 mm. The substrate was ultrasonically cleaned in acetone, alcohol and distilled water for 20 minutes, and then used high-purity N 2 Dry it and place it on the sample rack facing the target in the AIP-650 arc ion coating machine. The rotation speed of the rotating rack is 10 r / min and the target base distance is 150 mm. The target materials are respectively pure metal Cr and Al (purity 99.99 wt. %), and the working gas and reaction gas are respectively selected high-purity Ar and N 2 (The purity is 99.999%).
[0019] First evacuate the background vacuum of the vacuum chamber to 1.0×10 -3 Pa below; turn on the heating system, raise the temperature to 400 ℃, then pass Ar gas 60 sccm into the vacuum chamber until the pressure in the coating chamber reaches 1 Pa, add -800 V negative bias, and glow cleaning for 20 minutes. Turn on 4 pure Cr target...
Embodiment 2
[0022] In this embodiment, an AlCrN nanocomposite coating is deposited on the polished hard alloy substrate YG8, and the sample size is 19×19×2 mm. The substrate was ultrasonically cleaned in acetone, alcohol and distilled water for 20 minutes, and then used high-purity N 2 Dry it and place it on the sample rack facing the target in the domestic AIP-650 arc ion coating machine. The rotating rack speed is 20 r / min and the target base distance is 150 mm. The target materials are respectively pure metal Cr and Al (purity is wt. 99.9%), and the working gas and reaction gas are respectively selected as Ar and N 2 (The purity is 99.999%).
[0023] First evacuate the background vacuum of the vacuum chamber to 1.0×10 -3 Pa below. Turn on the heating system and increase the temperature to 450 ℃, then inject 90 sccm of Ar gas in the vacuum chamber until the pressure in the coating chamber reaches 1 Pa, add -700 V negative bias, and glow for 20 minutes. Turn on 4 pure Cr targets (the targ...
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