Manufacturing method of adjustable blazed grating based on magnetic field

Abstract

The invention discloses a manufacturing method of an adjustable blazed grating based on a magnetic field. The manufacturing method comprises the following steps: manufacturing of a silicon mold: sputtering a metal film A on the surface of a cleaned silicon wafer, then gelatinizing, exposing, developing and corroding the metal film A, and preparing the silicon mold A through dry etching silicon; preparing a mold B according to same steps; rolling over the molds to prepare a flexible magnetic polymer grid line; manufacturing of a reflecting surface: coating the surface of the mold B with a configured polymer mixture, then applying a substrate, heating a solidified polymer, demolding to obtain a flexible polymer grid line, sputtering a metal film C with the deposition thickness of 20 to 300 nm on the surface of the flexible polymer grid line to obtain the reflecting surface; and adjusting the transferring of the reflecting surface by using the magnetic field so as to realize the adjustment for an blazing angle of the blazed grating. The blazing angle of the blazed grating is accurately adjusted by using the magnetic field; and the manufacturing method has the advantages that the blazing angle can be accurately adjusted, the response is quick and the cost is low.

Description

technical field [0001] The invention relates to the technical field of manufacturing blazed gratings, in particular to a method for manufacturing blazed gratings adjustable based on a magnetic field. Background technique [0002] Diffraction efficiency is one of the important performance indicators of the basic optical element grating. The blazed grating can effectively improve the diffraction efficiency. It is a grating with a periodic structure of a sawtooth groove. [0003] At present, the main manufacturing methods of blazed gratings include mechanical scribing, holographic interferometry, laser, electron beam, ion beam, wet etching, etc. [0004] The mechanical scoring method is a method of extruding and polishing a soft material with a carving knife to form a groove. The marking machine has high requirements on the working conditions, the tool is easily damaged, the quality of the groove is poor, and the diffraction efficiency is not ideal; [0005] The holographic ...

AI Technical Summary

Problems solved by technology

There are problems such as the top of the groove is easily corroded into a platform, and the diffraction efficiency is not ideal

[0008] It can be seen that the preparation cost of the blazed grating is high, the groove shape is poor, and the blaze angle is difficult to control accurately. After the blazed grating is manufactured, it corresponds to a constant blaze angle, and the blaze angle cannot be adjusted.

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