Manufacturing method of adjustable blazed grating based on magnetic field

A technology for blazed gratings and manufacturing methods, applied in the direction of diffraction gratings, etc., can solve the problems of easy corrosion, poor groove shape, and uncontrollable blaze angles, and achieve the effects of precise blaze angles, control of blaze angles, and low cost

Active Publication Date: 2017-09-12
CHANGZHOU RUIFENGTE TECH CO LTD
View PDF5 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are problems such as the top of the groove is easily corroded into a platform, and the diffraction efficiency is not ideal
[0008] It can be seen that the preparation cost of the blazed grating is high,

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Manufacturing method of adjustable blazed grating based on magnetic field
  • Manufacturing method of adjustable blazed grating based on magnetic field
  • Manufacturing method of adjustable blazed grating based on magnetic field

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0034] see Figure 1 to Figure 6 , Example 1

[0035] 1. If figure 1 , figure 2 Shown is the manufacturing process flow chart of the silicon mold, and the specific steps are as follows:

[0036] (1) Use a mixed solution of concentrated sulfuric acid and hydrogen peroxide with a volume ratio of 3:1 to soak the sample monocrystalline silicon wafer 1 at 80°C for 30 minutes, then ultrasonically clean it with ultrapure water for 5 minutes at room temperature, and dry it with pure nitrogen. Bake at 150°C for 60 minute...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Login to view more

Abstract

The invention discloses a manufacturing method of an adjustable blazed grating based on a magnetic field. The manufacturing method comprises the following steps: manufacturing of a silicon mold: sputtering a metal film A on the surface of a cleaned silicon wafer, then gelatinizing, exposing, developing and corroding the metal film A, and preparing the silicon mold A through dry etching silicon; preparing a mold B according to same steps; rolling over the molds to prepare a flexible magnetic polymer grid line; manufacturing of a reflecting surface: coating the surface of the mold B with a configured polymer mixture, then applying a substrate, heating a solidified polymer, demolding to obtain a flexible polymer grid line, sputtering a metal film C with the deposition thickness of 20 to 300 nm on the surface of the flexible polymer grid line to obtain the reflecting surface; and adjusting the transferring of the reflecting surface by using the magnetic field so as to realize the adjustment for an blazing angle of the blazed grating. The blazing angle of the blazed grating is accurately adjusted by using the magnetic field; and the manufacturing method has the advantages that the blazing angle can be accurately adjusted, the response is quick and the cost is low.

Description

technical field [0001] The invention relates to the technical field of manufacturing blazed gratings, in particular to a method for manufacturing blazed gratings adjustable based on a magnetic field. Background technique [0002] Diffraction efficiency is one of the important performance indicators of the basic optical element grating. The blazed grating can effectively improve the diffraction efficiency. It is a grating with a periodic structure of a sawtooth groove. [0003] At present, the main manufacturing methods of blazed gratings include mechanical scribing, holographic interferometry, laser, electron beam, ion beam, wet etching, etc. [0004] The mechanical scoring method is a method of extruding and polishing a soft material with a carving knife to form a groove. The marking machine has high requirements on the working conditions, the tool is easily damaged, the quality of the groove is poor, and the diffraction efficiency is not ideal; [0005] The holographic ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G02B5/18
Inventor 史永胜刘红忠尹磊陈邦道
Owner CHANGZHOU RUIFENGTE TECH CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap