A kind of preparation method of sulfur-containing hollow carbon microspheres
A technology of hollow carbon and microspheres, which is applied in the field of preparation of sulfur-containing hollow carbon microspheres, can solve the problems of less functional groups on the surface of the product, high temperature requirements, and high preparation temperature, and achieve simple operation, increased output, and good repeatability Effect
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Embodiment 1
[0027] The device used in this example is the BTF-1200C-S-SSL-PECVD tube furnace produced by Anhui Beiike Equipment Technology Co., Ltd.
[0028] (1) Take 500mg of elemental sulfur in a vial and put it in the first heating zone; take 3mg of tungsten hexacarbonyl powder in a vial and put it in the second heating zone; place the monocrystalline silicon substrate in the second heating zone rear side of the area;
[0029] (2) Pass argon gas to exhaust the air in the quartz tube before starting to heat up, and then increase the pressure to 20Pa under the conditions of 10sccm argon and 10sccm hydrogen; raise the temperature of the first temperature zone to 160°C, and raise the temperature of the second temperature zone to 170°C ; Adjust the plasma generator to 100W, react for 10min, and then drop to room temperature to obtain sulfur-containing carbon microspheres.
[0030] The optical photo of the sample in this embodiment is as figure 1 As shown, it can be seen from the figure th...
Embodiment 2
[0032] (1) Take 500 mg of elemental sulfur in a vial and put it in the first heating zone; take 1.5 mg of tungsten hexacarbonyl powder in a vial and put it in the second heating zone; place the glass substrate in the second heating zone rear side;
[0033] (2) Pass in argon to exhaust the air in the quartz tube before starting to heat up, and then increase the pressure to 10Pa under the conditions of 10sccm argon and 10sccm hydrogen; raise the temperature of the first temperature zone to 160°C, and raise the temperature of the second temperature zone to 170°C ; Adjust the plasma generator to 200W, react for 10min, and then drop to room temperature to obtain sulfur-containing carbon microspheres.
[0034] The scanning electron micrograph of sample in this embodiment is as figure 2 As shown, obtained from the figure, the surface of the microsphere is relatively smooth, and the particle size of the microsphere is about 2 microns.
Embodiment 3
[0036] (1) Take 500mg of elemental sulfur in a vial and put it in the first heating zone; take 1mg of tungsten hexacarbonyl powder in a vial and put it in the second heating zone; put the copper foil substrate in the second heating zone side;
[0037] (2) Pass in argon gas to exhaust the air in the quartz tube before starting to heat up, and then increase the pressure to 0.1 Pa under the conditions of 10 sccm argon and 10 sccm hydrogen; raise the temperature of the first temperature zone to 160°C, and raise the temperature of the second temperature zone to 170°C °C; adjust the plasma generator to 300W, react for 10 minutes, and then cool down to room temperature to obtain sulfur-containing carbon microspheres.
[0038] The transmission electron micrograph of sample in this embodiment is as image 3 As shown in (a), it can be seen from the figure that the microsphere is a hollow structure. image 3 As shown in (b), the analysis shows that the atomic percentage of carbon in th...
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Abstract
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