Manganese-doped titanium dioxide nanotube array film, gas sensor and preparation method thereof

A technology of nanotube array and titanium dioxide, which is applied in the direction of nanotechnology, analysis of gas mixture, gas analyzer structure details, etc., can solve the problems affecting the nano effect of materials, achieve large specific surface area, improve gas sensing performance, and simple process Effect

Active Publication Date: 2019-01-25
武汉微纳传感技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the powder coating method (ACS Appl. Mater. Interfaces 2013, 5: 12310) is generally used to prepare titanium dioxide gas sensors, which leads to disordered accumulation and affects the play of nano-effects of materials.

Method used

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  • Manganese-doped titanium dioxide nanotube array film, gas sensor and preparation method thereof
  • Manganese-doped titanium dioxide nanotube array film, gas sensor and preparation method thereof
  • Manganese-doped titanium dioxide nanotube array film, gas sensor and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0032] Use the polished titanium sheet as the anode, roll the titanium sheet into an arc shape, the convex surface of the titanium sheet is facing the cathode of the graphite sheet, and use ethylene glycol-NH 4 F-Mn(CH3 COO) 2 The system is used as an electrolyte, which contains 1.8wt% deionized water, 0.3wt% NH 4 F and 0.1g / L Mn(CH 3 COO) 2 , ethylene glycol is the remainder (the following examples are the same), and anodic oxidation is carried out at a voltage of 30V for 1h. Immerse the oxidized titanium sheet in 30% hydrogen peroxide for 10 minutes, take it out and immerse it in deionized water for 10 minutes to ultrasonically remove the oxide film formed on the surface of the titanium sheet, and then put it into the same electrolyte as above for a second anodic oxidation reaction for 3 hours. The reacted titanium sheet was cleaned with ethanol, dried in an oven at 80°C, and then heat-treated in a muffle furnace at 450°C for 3 hours. Put the heat-treated titanium sheet ...

Embodiment 2

[0035] Referring to Example 1, the difference is that the electrolyte contains 5.4wt% deionized water, 0.5wt% NH 4 F and 0.5g / L Mn(CH 3 COO) 2 . The material was prepared by anodizing at 20V for 1.5h, and the second anodizing reaction was 6h (20V). After cleaning, dry it in an oven at 110°C, and then heat-treat it at 350°C for 4 hours. Three times anodic oxidation reaction 12h (20V). According to the method of Example 1, a nanotube array membrane ceramic tube element was fabricated, dried at 110° C., and heat treated at 350° C. for 4 hours to obtain a manganese-doped titanium dioxide nanotube array membrane gas sensor.

Embodiment 3

[0037] Referring to Example 1, the difference is that the electrolyte contains 3.6wt% deionized water, 0.2wt% NH 4 F and 0.2g / L of Mn(CH 3 COO) 2 . The material was prepared by anodizing at 40V for 0.5h, followed by secondary anodizing for 1h (40V). After cleaning, put it into a 90°C oven for drying, and then heat-treat it at 550°C for 4 hours. Three times anodic oxidation reaction 15h (40V). According to the method of Example 1, a nanotube array membrane ceramic tube element was fabricated, dried at 90° C., and heat treated at 550° C. for 4 hours to obtain a manganese-doped titanium dioxide nanotube array membrane gas sensor.

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Abstract

The invention discloses a manganese-doped titanium dioxide nanotube array membrane, a gas-sensitive element and a preparation method for the gas-sensitive element. According to the manganese-doped titanium dioxide nanotube array membrane, the gas-sensitive element and the preparation method for the gas-sensitive element, the manganese-doped titanium dioxide nanotube array membrane is prepared in situ with an anodic oxidation method, is stripped off through heat treatment combining the anodic oxidation method and is transferred to a ceramic tube to prepare the gas-sensitive element. The manganese-doped titanium dioxide nanotube array membrane, the gas-sensitive element and the preparation method for the gas-sensitive element have the advantages that the preparation process is simple, the cost is low, the process parameters are convenient to control, the prepared manganese-doped titanium dioxide nanotube array membrane is regular in structure, the size of nano tubes is uniform, the optical band gap can be reduced, and the gas-sensitive performance can be remarkably improved.

Description

technical field [0001] The invention belongs to the field of semiconductor gas-sensing materials and device preparation, and in particular relates to a manganese-doped titanium dioxide nanotube array film, a gas-sensing element and a preparation method thereof. Background technique [0002] A gas sensor is a sensor device that detects a specific gas in the environment. It converts information such as the type and concentration of the gas into an electrical signal, and obtains the presence of the gas to be measured in the environment based on these electrical signals. It is widely used in biological, Industrial and environmental monitoring and other fields. The side-heated gas sensor overcomes the shortcomings of the direct-heated gas sensor, such as small heat capacity, easy to be affected by the ambient air flow, and easy to cause poor contact. It has better stability and has become the main gas sensor currently used. [0003] Gas sensors mainly include semiconductor gas s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D11/26B82Y40/00G01N27/00G01N33/00
CPCB82Y40/00C25D11/26G01N27/00G01N33/0009
Inventor 赵春霞徐周邵林清陈文金伟
Owner 武汉微纳传感技术有限公司
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