Elasto-optical type photonic crystal waveguide accelerometer

Abstract

The invention discloses an elasto-optical type photonic crystal waveguide accelerometer comprising an input waveguide, an output waveguide, a Mach-Zehnder Interferometer and a micro over beam structure; the micro over beam structure is employed so as to sense the external acceleration changes; the slow light enhancement photonic crystal waveguide technology can enhance the material refractive index changes under stress and electric field effects, thus improving the detection accuracy; the electric light crystal material and the piezoelectric material are employed so as to realize modulation-demodulation optical path and sensing optical path single chip integration; the accelerometer is high in integration level, high in detection precision, low in modulation half-wave voltage, and high in limit sensitivity.

Description

technical field [0001] The invention belongs to the technical field of integrated optics and sensing, in particular to a photonic crystal waveguide Mach-Zehnder interference accelerometer based on the elasto-optic effect. Background technique [0002] As an important measuring instrument, the accelerometer is widely used in current scientific research, production and manufacturing. In recent years, research on accelerometers has made great progress and has been widely used in various fields, such as vibration sensing, guidance systems, brake system control, oil seismic exploration, and as feedback signals for active suspension control systems. So far, various types of accelerometers have been realized using the conversion principle, such as capacitance type, compressive resistance type, Hall effect type, magnetoresistive type, heat transfer type, and accelerometers based on various optical effects. Compared with electrical accelerometers, optical accelerometers have many ad...

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Problems solved by technology

[0005] (1) The integrated integration of modulation and demodulation and sensing optical path has not been realized; modulation and demodulation is an essential part in high-precision optical sensing, and modulation and demodulation can suppress interference signals other than the modulation frequency to achieve weak signal The modulation and demodulation can also expand the detection range through closed-loop feedback control, but the existing micro accelerometers fail to realize the integrated integration of the modulation and demodulation and the sensing optical circuit, and most of them use optical fibers to connect with another modem device. In this way, the volume of the device is increased, and the integration and reliability of the device are reduced;

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