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A RESIST STRIPPER COMPOSITION METHOD, A DISPLAY DEVICE AND manufacturing method thereof

A technology of composition and stripping solution, applied in the preparation of detergent mixture compositions, detergent compositions, non-surface-active detergent compositions, etc., can solve the problem of not improving the corrosion resistance of metal films or metal wirings, etc. , to achieve the effect of high peeling force

Active Publication Date: 2018-01-12
DONGWOO FINE CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] For example, Korean Registered Patent No. 10-1557778 discloses a resist stripping liquid composition containing alkanolamines, organic solvents, etc., but does not improve the corrosion resistance against lower metal films or metal wirings containing metals such as molybdenum.

Method used

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  • A RESIST STRIPPER COMPOSITION METHOD, A DISPLAY DEVICE AND manufacturing method thereof
  • A RESIST STRIPPER COMPOSITION METHOD, A DISPLAY DEVICE AND manufacturing method thereof
  • A RESIST STRIPPER COMPOSITION METHOD, A DISPLAY DEVICE AND manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

experiment example 1

[0066] Photoresist Stripping Force Evaluation of Stripping Liquid

[0067] In order to confirm the stripping effect of the resist stripping liquid composition, after coating a 1.7 μm positive photoresist (DWG-520: our PR) on a glass substrate, it was heated on a hot plate (Hot plate) at 170°C. A 10-minute post-baking (Hardbake) was performed on the substrate to prepare the substrate. After maintaining the temperature of the resist stripping liquid composition at a constant temperature of 50° C., the above-mentioned substrate was immersed at intervals of 30 seconds to evaluate the stripping force. Thereafter, in order to remove the stripping solution remaining on the substrate, cleaning was performed with deionized water (DIW; Deilonized water) for 1 minute, and the substrate was completely dried with nitrogen gas in order to remove DIW remaining on the substrate after cleaning. The evaluated substrates were visually confirmed, and the time until the resist was completely rem...

experiment example 2

[0068] Evaluation of Corrosion Resistance of Stripper Metal Wiring

[0069] In order to evaluate the corrosion prevention ability of the resist stripping liquid composition for metal wiring, Mo / Al, Cu / X layers (X: Ti, Mo, MoTi , MoW, MoNb). Thereafter, a photoresist pattern is formed, and a substrate on which a metal film is etched is prepared by a wet etching method. Using a simple strip spray (Strip Spray) evaluation equipment, the stripping liquid composition is kept at a constant temperature of 60°C, and the above-mentioned substrate is sprayed at 2kgf / cm 2 Spray and peel under pressure for 2 minutes, and then use simple DIW cleaning and spraying equipment to wash the above-mentioned peeled substrate at room temperature at 2kgf / cm 2 Pressure applied for 3 minutes to spray wash. For substrates that have been cleaned, use N 2 Drying was carried out, and the process of realizing DIW cleaning and drying in the above peeling process was repeated three times, and the substr...

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PUM

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Abstract

The invention provides a resist stripper composition method, a display device and a manufacturing method thereof. The resist stripper composition is characterized in that the resist stripper composition comprises (a) Amino alkylsilane compound, (b) alkanol amine and (c) polar organic solvents, and does not comprise ammonium hydroxide nor quaternary ammonium base. In the following chemical formula1, R1, R2 and R3 are respectively alkyl having 1-4 carbon, R4 is alkylidene having 1-5 carbon, R5 and R6 are respectively alkyl, hydroxyl having 1-5 hydrogen atom and carbon, or alkoxy group having 1-4 carbon atom. Under the situation that R5 is hydroxyl or alkoxy group, R6 is hydrogen atom or alkyl. Under the situation that R6 is hydroxyl or alkoxy group, R5 is hydrogen atom or alkyl.

Description

technical field [0001] The present invention relates to a resist stripping liquid composition using an aminoalkylsilane compound having excellent galvanic and crevice corrosion resistance, a method for producing a display substrate produced using the same, and a display substrate produced therefrom. Background technique [0002] In recent years, as demands for high-resolution representation of display substrates have increased, efforts to increase the number of pixels per unit area have continued. According to such a trend, reduction in wiring width is required. In response to this, process conditions such as the introduction of a dry etching process have become increasingly severe. In addition, since the signal speed in wiring is also required to be increased due to the increase in the size of flat panel display devices, copper, which has a lower resistivity than aluminum, is used as a wiring material. Affected by this, the required performance of the stripping liquid use...

Claims

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Application Information

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IPC IPC(8): G03F7/42
CPCG03F7/42C11D7/3218C11D7/5022C09K15/20C09K15/08C09K15/06G03F1/82G03F1/60C11D2111/22
Inventor 金正铉金圣植高京俊
Owner DONGWOO FINE CHEM CO LTD