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Method and device for processing sapphire crystal growth furnace tungsten heating body and recycling metallic molybdenum

A technology of tungsten heating body and crystal growth furnace, which is applied in the field of processing tungsten heating body of sapphire crystal growth furnace and recovering metal molybdenum and devices, which can solve the problems of resistance value drop, uneven crystallinity, and change of crystal temperature field distribution.

Pending Publication Date: 2018-03-30
HARBIN AURORA OPTOELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Second, according to Ohm's law, the diameter of the resistor becomes thicker, and the resistance value will decrease
This will change the temperature field distribution of crystal growth, cause inhomogeneity in crystallinity, and also affect the quality of crystals.

Method used

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  • Method and device for processing sapphire crystal growth furnace tungsten heating body and recycling metallic molybdenum
  • Method and device for processing sapphire crystal growth furnace tungsten heating body and recycling metallic molybdenum
  • Method and device for processing sapphire crystal growth furnace tungsten heating body and recycling metallic molybdenum

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] combine Figure 1-5 In this embodiment, the birdcage-shaped tungsten rod heating body is taken out from the sapphire crystal growth furnace, and the copper base of the heating body is removed. Select several points on the upper and lower parts of the tungsten rod heating body, and use a vernier caliper to measure the diameter of the tungsten rod. If the difference between the diameters of the upper and lower points is greater than 1 mm, it means that the deposited layer is thicker, and the tungsten rod heating body needs two steps of physical and chemical regeneration. Firstly, put the tungsten rod heating body into the reactor 1, inject a certain amount of water liquid 8, and the liquid level should be higher than the height of the heating body. Then, the reactor system is sealed by using the sealing cover 3 connected with the ultrasonic generator, and the ultrasonic generator 5 is used for ultrasonic vibration cleaning. After a certain period of time, take out the t...

Embodiment 2

[0025] Take out the tungsten rod heating body from the sapphire crystal growth furnace, and remove the copper base of the heating body. Select several points on the upper and lower parts of the tungsten rod heating body, and use a vernier caliper to measure the diameter of the tungsten rod. If the difference between the diameters of the upper and lower points is less than 1 mm, it indicates that the thickness of the deposited layer is relatively small. In this case, the process of reducing the thickness of the deposited layer by ultrasonic waves can be omitted, and the deposited layer on the surface of the tungsten rod can be directly removed by chemical methods, and the refractory metal molybdenum can be recovered. Put the birdcage-like tungsten rod heating body into the reactor as a whole, and seal the reactor with a sealing cover with a gas pressure gauge. Chlorine gas was introduced into the reactor, the air in the reactor was exhausted by chlorine gas, and the outlet was...

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Abstract

The invention provides a method and device for processing a sapphire crystal growth furnace tungsten heating body and recycling metallic molybdenum. A reactor device system is utilized to process thesapphire crystal growth furnace tungsten heating body with the surface being deposited with a molybdenum metal layer. The thickness of the deposited molybdenum layer is reduced through ultrasonic waves, and then the remaining molybdenum layer is removed through a chemical method. The chemical method comprises the steps that the chlorine gas selectively reacts with molybdenum atoms to generate MoCl5 volatile molecules, therefore the molybdenum metal layer on the surface of a tungsten bar is removed, the surface of the tungsten heating body is regenerated, and the service life of the tungsten heating body is prolonged. Meanwhile, the volatile molecules are absorbed by an alkali liquor and reverted to the molybdenum atoms by reducing gases after generating MoO2. By means of the method and device, the service life of the tungsten bar heating body can be prolonged, and the refractory nonferrous molybdenum can also be recycled and utilized.

Description

technical field [0001] The invention relates to a method for prolonging the service life of a tungsten rod heating body of a sapphire crystal growth furnace and a method for recycling metal molybdenum. Background technique [0002] Sapphire, also known as corundum, is an oxide composed of aluminum and oxygen. It has great hardness and excellent optical transmittance. It has been used in personal consumer electronics products, such as mobile phones, Ipad and other electronic equipment screens. At the same time, it is an extremely important substrate material for the microelectronics and optoelectronics industries, and can be used as a substrate material for LED lights. With the growth of demand for personal consumer electronics and the need to save energy, the demand for sapphire materials is increasing. [0003] There are many methods for growing sapphire single crystals, mainly including bubble growth, pulling method, pouring method and heat exchange method. Regardless o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22B34/34C30B35/00C23F4/00
CPCC22B34/34C23F4/00C30B35/00
Inventor 左洪波杨鑫宏李铁其他发明人请求不公开姓名
Owner HARBIN AURORA OPTOELECTRONICS TECH