Method for increasing storage density of aerospace anti-radiation memory and memory
A technology of storage density and memory, applied in the field of information storage, can solve the problems of high-density storage of undisclosed memory, unoptimistic prospects for commercial promotion, and unfavorable stable storage of memory, etc. The effect of storage density
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[0032] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0033] The invention provides a method for improving the storage density of an aerospace anti-radiation memory. The front end of the memory adopts a standard logic CMOS process, and the back end connects the storage unit with the drain of the memory CMOS. The storage unit has a three-layer structure, including a platinum electrode layer, a nickel oxide storage layer and a platinum electrode layer, and the nickel oxide in the nickel oxide storage layer is polycrystalline. In the preparation process of the new aerospace radiation-resistant memory, the preparation process has a great influence on the electromagnetic control storage performance of the storage unit. In the preparation process of the nickel oxide dielectric layer, parameters such as the oxygen pressure in the cavity, the temperature in the laser pulse deposition cavity, and the thickness of the ...
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