A kind of preparation method of Fe, Al, Co, Cu, Cr, Mn alloy target material

An alloy target and alloy technology, which is applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems of poor machining and forming performance, poor bonding force between raw materials, and low target density. Achieve the effect of eliminating precious metal loss, improving density and simplifying production process

Inactive Publication Date: 2019-11-22
AEROSPACE HIWING HARBIN TITANIUM IND
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Problems solved by technology

[0006] Aiming at the problems of easy oxidation of raw materials, poor bonding force between raw materials, and poor infiltration in the current alloy target processing process, the target has low density, poor machining and forming performance, etc., the present invention provides a Fe, Al, Co, Cu , Cr, Mn alloy target material preparation method, its preparation process is carried out according to the following steps:

Method used

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  • A kind of preparation method of Fe, Al, Co, Cu, Cr, Mn alloy target material
  • A kind of preparation method of Fe, Al, Co, Cu, Cr, Mn alloy target material
  • A kind of preparation method of Fe, Al, Co, Cu, Cr, Mn alloy target material

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Embodiment 1

[0029] Embodiment 1. This embodiment describes a method for preparing Fe, Al, Co, Cu, Cr, Mn alloy targets, and the preparation method includes the following process:

[0030] (1) Selection and proportioning of raw materials: select Fe, Al, Co, Cu, Cr, Mn bulk metals with a purity greater than 99.9% respectively, and mix them according to the ratio of atomic equimolar ratios to obtain alloy raw materials with equimolar ratios Element;

[0031] (2) Alloy smelting: In a non-consumable vacuum smelting furnace, the mixed alloy raw materials are smelted to obtain alloy ingots;

[0032] (3) Powdering of alloy ingots: the alloy ingots that have been smelted are powdered to obtain alloy powders;

[0033] (4) powder sintering treatment: the alloy powder is sintered;

[0034] (5) Hot isostatic pressing treatment: the sintered alloy powder obtained in step (4) is subjected to hot isostatic pressing treatment, and then taken out of the furnace to obtain an alloy target material.

[003...

Embodiment 2

[0036] Example 2. This example is a further limitation of Example 1, specifically describing the preparation method of Fe, Al, Co, Cu, Cr, Mn alloy targets.

[0037] (1) Selection and proportioning of raw materials: In this embodiment, Fe, Al, Co, Cu, Cr, and Mn are selected as bulk and granular metals with a purity higher than 99.9%, and are mixed according to the ratio of atomic equimolar ratios to obtain etc. Alloy raw material composition in molar ratio;

[0038] (2) Alloy smelting: The WK-П non-consumable vacuum smelting furnace is then used to prepare high-entropy alloy ingots. The smelting is carried out in an argon atmosphere at 1 atmosphere, the smelting current is 250A, and the number of smelting times is 5-8 times. Obtain alloy ingots; smelt 5 to 8 times to obtain alloy ingots with uniform distribution of raw material components;

[0039] (3) Powdering of alloy ingots: the alloy ingots are first refined and crushed by mechanical stamping, and then the alloy ingots ...

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Abstract

The invention provides a preparation method for a Fe-Al-Co-Cu-Cr-Mn alloy target material, belonging to the field of powder metallurgy technology. The preparation method of the invention overcomes theproblems of low density, poor machinability and formability and the like of target materials due to proneness of raw materials to oxidation, poor bonding among raw materials and poor infiltration during processing of conventional alloy target materials. According to the invention, blocky Fe, Al, Co, Cu, Cr and Mn metals with purity of more than 99.9% are selected and mixed according to a specificatomic mol ratio; and the mixed alloy raw materials are successively subjected to melting, powdering, powder sintering, hot isostatic pressing and cooling in a nonconsumable vacuum melting furnace, and a product is taken out from the furnace so as to obtain the Fe-Al-Co-Cu-Cr-Mn alloy target material. The method is widely applicable to manufacturing of metal-oxide composite materials and suitablefor continuous industrial production.

Description

technical field [0001] The invention belongs to the technical field of powder metallurgy, and in particular relates to a method for preparing a novel alloy-high-entropy alloy target. Background technique [0002] High-entropy alloy is a new type of multi-principal, high-mixing-entropy alloy prepared by five or more metals and non-metallic elements in an equimolar or nearly equimolar ratio. It has excellent mechanical, chemical, electromagnetic and The advantages of high-temperature oxidation resistance, especially in the field of magnetic recording media, are more and more showing their superiority. [0003] In recent years, with the rapid development of the computer industry, microelectronic semiconductor integrated circuits, thin film hybrid integrated circuits, chip components, especially hard disks, optical discs and liquid crystal flat panel display LEDs have also achieved rapid development. However, in these industries, films of different materials are required to mee...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35B22F9/04B22F3/105B22F3/15
CPCB22F3/105B22F3/15B22F9/04B22F2009/043B22F2998/10C23C14/3414C23C14/35
Inventor 郑作赟卢新昌林明宇吴东辉姜青阳曲秋实
Owner AEROSPACE HIWING HARBIN TITANIUM IND
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