Pulmonary alveolus bionic structure based flexible self-driving gas sensor and preparation method thereof
A gas sensor and bionic technology, applied in scientific instruments, instruments, measuring devices, etc., can solve the problems of low output power density, limited wide application, strict material requirements, etc., to achieve stable output performance, small measurement error, and processing. low cost effect
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Embodiment 1
[0043] A flexible gas self-actuated sensor based on alveolar bionics structure such as figure 1 As shown, it is characterized in that: it includes an insulating base stacked from bottom to top, a first friction member and a second friction member;
[0044] The first friction component includes: a first triboelectric layer, an electrode layer and a gas-sensitive thin film layer, the first triboelectric layer has a first surface and a second surface oppositely arranged, and the first surface is deposited with gas Sensitive material, electrode material is deposited on the second surface;
[0045] The second friction component includes: a second triboelectric layer, the second triboelectric layer is in contact with the surface where the gas-sensitive thin film layer is located on the first triboelectric layer, and the edges of the two are fixed, and the second triboelectric layer The layer is an elastic film material that deforms with changes in air pressure;
[0046] The first ...
Embodiment 2
[0054] The manufacturing process of a flexible self-driven nitrogen dioxide sensor based on the alveolar bionic structure is as follows: figure 2 As shown, it specifically includes the following steps:
[0055] (1), select the plexiglass substrate 1 of 1mm, the nylon film 3 of the latex film 4,75 μm of 50 μm for use, and adopt chemical reagents such as acetone, ethanol to clean and dry it;
[0056] (2), the organic glass 1 that will clean, latex film 4, nylon film 3 are cut into the square structure of 4cm * 4cm by laser cutting machine;
[0057] (3), at 4cm * 4cm nylon film 3 one-sided vapor deposition layer of copper is used as electrode layer, the present invention does not limit to the deposition mode of electrode layer, present embodiment adopts and uses thermal evaporation method; By laser cutting machine in The center of the square nylon film plated with the copper electrode layer 2 and the center of the plexiglass substrate 1 are cut to form a circular air hole with ...
Embodiment 3
[0066]This embodiment is intended to produce a flexible self-driven ammonia sensor based on alveolar bionics structure. Compared with embodiment 2, except that the material of the gas-sensitive film layer 7 is replaced by polyaniline film, the rest of the steps are the same as embodiment 2.
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