Synthesis and application of a two-dimensional material of tantalum telluride
A two-dimensional material, field effect transistor technology, applied in the field of nanomaterials
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Embodiment 1
[0111] TaTe 2 Preparation of nanosheets:
[0112] will hold TaCl 5 The porcelain boat of the powder is placed upstream of the tube furnace (the temperature is 200°C, which is the volatilization temperature), and the porcelain boat with tellurium powder is placed at 4cm from the center of the constant temperature zone (the temperature is 620°C), and a piece of Si / 285nm SiO 2 as TaTe 2 The bright side of the growth substrate is placed between the porcelain boat 4 and the porcelain boat 5 to obtain a suitable crystal growth temperature. TaCl 5 The mass ratio of powder and Te powder is 1:1 (0.1g / 0.1g). Before heating, exhaust the air in the quartz tube with a large flow of argon. Then the constant temperature zone 2 is heated up to 620°C (deposition temperature), and the flow rate of the argon-hydrogen mixed gas is 30 / 7sccm, and the constant temperature is 10min, and there will be a single crystal TaTe on the silicon wafer. 2 Nanosheet generation. TaTe 2 The experimental ...
Embodiment 2
[0115] Compared with Example 1, the difference is that TaCl 5 The powder volatilization temperature is 200°C, the substrate temperature is 620°C (deposition temperature is 620°C), TaCl 5 The mass ratio of powder and Te powder is 1:1 (0.1g / 0.1g), the flow rate is 40 / 10 sccm, the position of tellurium powder is 4cm from the center of the constant temperature zone (temperature is 610°C), and the deposition time is 10min. Figure 6 shows the prepared TaTe 2 Optical schematic diagram of nanosheet, Si / SiO 2 The base is light red and the red triangle is TaTe 2 ; Wherein, the thickness is 8 nm, and the size is 10 μm. Figure 6 The scale bar in is 10 μm.
Embodiment 3
[0117] Compared with Example 1, the difference is that TaCl 5 The powder volatilization temperature is 200°C, the substrate temperature is 620°C (deposition temperature is 620°C), TaCl 5 The mass ratio of powder to Te powder is 1:1 (0.1g / 0.1g), the flow rate is 20 / 5 sccm, the position of tellurium powder is 4cm from the center of the constant temperature zone (temperature is 610°C), and the deposition time is 10min. Figure 7 shows the prepared TaTe 2 Optical schematic diagram of nanosheet, Si / SiO 2 The base is light red and the white hexagons are TaTe 2 ; Wherein, the thickness is 50-100nm, and the size is 5-8μm. Figure 7 The scale bar in is 10 μm
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