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Preparation method of space optical isolator and optical waveguide based on oxygen ion implantation of terbium gallium garnet optical waveguide

A technology of terbium gallium garnet and oxygen ion implantation, which is applied to optical waveguides, light guides, instruments, etc., to achieve the effect of improving coherent signal-to-noise ratio, reducing loss, and ensuring that the linear polarization direction remains unchanged.

Active Publication Date: 2019-03-19
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] So far, no terbium gallium garnet crystals (Tb 3 Ga 5 o 12 ) crystals to prepare optical waveguides and fabricate spatial optical isolators

Method used

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  • Preparation method of space optical isolator and optical waveguide based on oxygen ion implantation of terbium gallium garnet optical waveguide
  • Preparation method of space optical isolator and optical waveguide based on oxygen ion implantation of terbium gallium garnet optical waveguide
  • Preparation method of space optical isolator and optical waveguide based on oxygen ion implantation of terbium gallium garnet optical waveguide

Examples

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Effect test

Embodiment 1

[0035] Such as figure 2 As shown, a method for preparing an optical waveguide based on oxygen ion implantation of terbium gallium garnet crystal includes the following steps:

[0036] (1) Optically polish the surface to be processed of the terbium gallium garnet crystal 10, and remove the surface impurities of the polished terbium gallium garnet crystal after optical polishing; c axis is vertical;

[0037] (2) Using an ion beam accelerator to emit an oxygen ion beam 8 to bombard the surface of the terbium gallium garnet crystal 10 to form a planar optical waveguide 9 with a thickness of 8 μm on the polished surface of the directly bombarded terbium gallium garnet crystal 10;

[0038] The oxygen ion beam 8 emitted by the ion beam accelerator has an energy of 15Mev and a dose of 1×10 15 ions / cm 2 ;

[0039] (3) A diamond cutting blade 11 is used in the planar optical waveguide 9 to cut two parallel grooves 12, the groove 12 has a depth of 8 μm and a width of 100 μm; the distance betwee...

Embodiment 2

[0043] A method for preparing an optical waveguide based on oxygen ion implantation of terbium gallium garnet crystal includes the following steps:

[0044] (1) Optically polish the surface to be processed of the terbium gallium garnet crystal 10, and remove the surface impurities of the polished terbium gallium garnet crystal after optical polishing; c axis is vertical;

[0045] (2) Using an ion beam accelerator to emit an oxygen ion beam 8 to bombard the surface of the terbium gallium garnet crystal 10, and form a flat optical waveguide 9 with a thickness of 9 μm on the polished surface of the terbium gallium garnet crystal 10 directly bombarded;

[0046] The oxygen ion beam 8 emitted by the ion beam accelerator has an energy of 16Mev and a dose of 5×10 15 ions / cm 2 ;

[0047] (3) A diamond cutting blade 11 is used to cut two parallel grooves 12 in the planar optical waveguide 9, the groove 12 has a depth of 9 μm and a width of 150 μm; the interval between the two grooves 12 is 25 μ...

Embodiment 3

[0051] A method for preparing an optical waveguide based on oxygen ion implantation of terbium gallium garnet crystal includes the following steps:

[0052] (1) Optically polish the surface to be processed of the terbium gallium garnet crystal 10, and remove the surface impurities of the polished terbium gallium garnet crystal after optical polishing; c axis is vertical;

[0053] (2) Using an ion beam accelerator to emit an oxygen ion beam 8 to bombard the surface of the terbium gallium garnet crystal 10 to form a planar optical waveguide 9 with a thickness of 10 μm on the polished surface of the terbium gallium garnet crystal 10 directly bombarded;

[0054] The oxygen ion beam 8 emitted by the ion beam accelerator has an energy of 17 Mev and a dose of 10×10 15 ions / cm 2 ;

[0055] (3) A diamond cutting blade 11 is used in the planar optical waveguide 9 to cut two parallel grooves 12, the groove 12 has a depth of 10 μm and a width of 200 μm; the distance between the two grooves 12 is ...

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Abstract

The invention relates to a space optical isolator based on an oxygen ion implantation terbium gallium garnet optical waveguide and the manufacturing method of an optical waveguide. The method mainly comprises the following steps of forming the optical waveguide in a TGG crystal and realizing a good optical isolation effect. Oxygen ions whose energy is 15 to 17 MeV and dosage is 1 to 10*10 <15> ions / cm <2> are used to bombard the surface of a terbium gallium garnet crystal so as to form an optical waveguide structure. A diamond is used to cut an optical waveguide surface so as to manufacture two parallel grooves, and then a ridge-type optical waveguide structure is formed. Two end surfaces which are vertical to a ridge-type optical waveguide are polished and are taken as an incident end surface and an outgoing end surface. Light is emitted from a laser, and through a polarization maintaining optical fiber, linearly polarized light is acquired; the light is transmitted to an incident optical fiber and is coupled to the optical waveguide through the incident end surface; through the outgoing end surface, the light is coupled to an outgoing optical fiber and is emitted through the polarization maintaining optical fiber; and the stable transmission of the light is realized and a light isolation effect is improved.

Description

Technical field [0001] The invention relates to a spatial optical isolator based on oxygen ion implantation of a terbium gallium garnet optical waveguide and a preparation method of the optical waveguide, and belongs to the technical field of optoelectronic device preparation. Background technique [0002] Terbium Gallium Garnet (Tb 3 Ga 5 O 12 , Or TGG crystal for short) is a paramagnetic crystal material with low absorption coefficient, high Verdet constant, and strong magneto-optical effect in the visible and near infrared regions. This material has a wider transmission area and a higher laser damage threshold. At the same time, because the crystal material is doped with Tb 3+ , So that it has high-quality material uniformity and high thermal conductivity unmatched by other materials. Also based on the above characteristics, TGG crystal has become the core material for Faraday devices, high-power isolators, and optical isolators at home and abroad, and has broad application p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/13G02B6/134G02B6/126G02F1/095
CPCG02B6/126G02B6/13G02B6/1347G02B2006/12035G02B2006/12157G02B2006/12169G02B2006/12188G02B2006/12197G02F1/0955
Inventor 王晨曦谭杨
Owner SHANDONG UNIV
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