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Optical transmissive AR glasses display chip and manufacturing method thereof

A technology of AR glasses and display chips, applied in optics, optical components, instruments, etc., can solve problems such as difficulty in miniaturization, short battery life, and inability to simultaneously display virtual and real information, so as to increase display density and reduce The effect of dot pitch

Active Publication Date: 2020-09-04
江西锐芯微电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The difficulties of the existing AR display technology are: 1. The core imaging component is a miniature LCOS projector, which is costly and difficult to miniaturize; high energy consumption, short battery life, large thickness and weight; there are also defects such as severe heat generation and poor wearing comfort
2. If the prism reflection method is used in the prior art, because the reflection angle is 45 degrees to the human eye, a simple calculation shows that the thickness of the angular lens is the same as the size of the display area, that is, when the height of the display area is 1.5cm, the angular The thickness reaches 1.5cm. Therefore, the solution using prism reflection has the defect of thicker and heavier lenses, and the thicker lenses prevent external light from entering the human eye, and the wearing comfort of the human body is poor.
The LED light-emitting pixel in the commonly used LED display is a single LED chip fixed on the circuit board. The circuit board, silver glue, welding wire, etc. are used to provide power drive and control drive for each LED chip. The circuit, silver glue, soldering wire, etc. The space occupied by lines and the like makes the display screen limited in increasing the dot pitch, and the pixel density per unit area is much lower than that of LCD display or OLED display, which does not meet the display requirements of high information density such as wearable smart watches and AR glasses.
[0009] On the other hand, commonly used LED displays have more silver glue, welding wires, metal lines and shell packaging components. Therefore, common LED displays cannot realize the overall transparent function, that is, external light cannot penetrate the LED display itself.
Therefore, the simultaneous display of virtual and real information by AR glasses and MR glasses cannot be satisfied.

Method used

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  • Optical transmissive AR glasses display chip and manufacturing method thereof
  • Optical transmissive AR glasses display chip and manufacturing method thereof
  • Optical transmissive AR glasses display chip and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Such as figure 1 and figure 2 , image 3 As shown, take a sapphire substrate and a blue LED epitaxial wafer with a light emission wavelength of about 465nm, and use a mixed solution of concentrated sulfuric acid:hydrogen peroxide at a ratio of 10:1 to clean the surface at a temperature of 90-115°C for 2-3 minutes; take it out after soaking and cleaning Rinse with deionized water for more than 10 minutes, take out nitrogen and blow dry for later use.

[0051] 1. Selectively etch the P-type layer of the LED epitaxial wafer by photolithography, ICP and other technologies according to the designed pixel unit size. The etching depth is based on the removal of the P-type layer of the LED epitaxial wafer; through etching, Micro LED pixel units are formed at intersections of rows and columns after etching on the surface of the epitaxial wafer.

[0052] 2. Through PECVD vapor deposition, a silicon dioxide protective film is deposited on the surface of the epitaxial wafer wit...

Embodiment 2

[0063] Such as figure 1 and figure 2 , image 3 As shown, take a sapphire substrate and a green LED epitaxial wafer with a light emission wavelength of about 520nm, and use a mixed solution of concentrated sulfuric acid:hydrogen peroxide at a ratio of 10:1 to clean the surface at a temperature of about 90-115 degrees for 2-3 minutes; soak and clean Then take out the deionized water for more than 10 minutes, take out the nitrogen gas and blow dry for later use.

[0064] 1. Selectively etch the P-type layer of the LED epitaxial wafer by photolithography, ICP and other technologies according to the designed pixel unit size, and the etching depth is about The removal of the P-type layer of the LED epitaxial wafer shall prevail; through etching, the micro-LED pixel unit is formed at the intersection of the etched row and column on the surface of the epitaxial wafer.

[0065] 2. Through PECVD vapor deposition, a layer of silicon dioxide protective film is deposited on the surfa...

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Abstract

The invention provides an optical transmission type AR (augmented reality) glasses display chip and a preparation method thereof. A P-type epitaxial layer is etched according to designed pixel unit size on a blue-light or green-light LED epitaxial wafer with an LED layer growing on a sapphire substrate, and PN junction independent LED pixels are formed; an N-type epitaxial layer of an epitaxial structure is etched downwards continuously, and electric isolation channels between rows in an LED display chip are formed; stealth cutting is performed in the isolation channels between rows, and a metamorphic zone in a laser beam direction is formed. A SiO2 or Si3O4 insulation diaphragm is deposited on the surface of the LED epitaxial wafer, and a through hole is machined in the top of each lightemitting pixel of the insulation diaphragm. An ITO layer is formed by evaporation, and an ITO conductive line is formed; light transmittance of ITO is increased, and an ITO film and the P-type LED epitaxial layer form ohmic contact at the through holes; Cr / Pt / Au / In composite metal contact terminals are formed at two ends of each row and each line of the chip, ground, cut and subjected to precise alignment and flip eutectic soldering with external control circuit terminals, and the applied LED display chip is formed.

Description

technical field [0001] The invention relates to an optical transmissive AR glasses display chip and a manufacturing method thereof, belonging to the technical field of optoelectronic device manufacturing. Background technique [0002] Augmented reality (Augmented Reality, referred to as AR) is a new technology that "seamlessly" integrates real-world information and virtual world information. It not only shows real-world information, but also displays virtual information at the same time. Supplement, add. The virtual object is integrated with the real environment, so the augmented reality system has the characteristics of combination of virtual and real, real-time interaction, intuitive and flexible. [0003] At present, the augmented reality system mainly has two display modes in principle: [0004] 1. Screen type: The camera captures real-world images and inputs them into the computer, synthesizes them with the virtual scene generated by the computer graphics system, and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/15H01L33/00G02B27/01
CPCG02B27/017H01L27/156H01L33/0095
Inventor 万金平于天宝高洪新刘芳娇
Owner 江西锐芯微电子科技有限公司