Unlock instant, AI-driven research and patent intelligence for your innovation.

Manufacture method of microfluidic chip with channel inner wall coated with Parylene

A technology of microfluidic chip and manufacturing method, which is applied in the direction of coating, microstructure technology, gaseous chemical plating, etc., can solve the problems that complex channel network coating cannot be carried out, and achieve shortening coating time, reducing dosage, and improving The effect of utilization

Active Publication Date: 2018-09-18
ZHEJIANG UNIV
View PDF8 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that the existing method cannot be used for complex channel network coating, shorten the coating time, and reduce material waste, the present invention uses a new chip sealing material to break through the limitation that Parylene-coated chips cannot be sealed, and provides a The microfluidic chip manufacturing method of coating Parylene on the inner wall of the channel is a microfluidic chip manufacturing method that first coats Parylene and then seals the chip. It realizes uniform Parylene on the inner wall of the complex network channel, which is simple, fast and economical. specialty

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Manufacture method of microfluidic chip with channel inner wall coated with Parylene
  • Manufacture method of microfluidic chip with channel inner wall coated with Parylene
  • Manufacture method of microfluidic chip with channel inner wall coated with Parylene

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] A microfluidic droplet digital PCR chip is manufactured by using the chip manufacturing method provided by the invention, and the chip is used for digital PCR reaction. figure 1 It is a flow chart of the method for fabricating a PDMS microfluidic chip coated with Parylene C provided in the embodiment of the present invention. figure 2 It is the design drawing of the droplet digital PCR chip in the embodiment of the present invention.

[0035] In this embodiment, the mold of the channel layer of the chip is made on a silicon wafer by multi-layer soft lithography technology, the material used to make the chip is PDMS, and the coated Parylene films are all Parylene C films. Production process such as figure 1 Shown: First, spin-coat 100 μm SU-8 negative photoresist on a clean silicon wafer 1, and after pre-baking at 95°C, use the film plate containing the droplet digital PCR chip channel structure as a mask for selective UV exposure 30s, copy the graphics on the mask pl...

Embodiment 2

[0040] Utilize the original method of first sealing and then coating the parylene film to manufacture the chip, the manufacturing process of the chip is as follows: use the photoresist mold among the embodiment 1, take PDMS as material by molding method, make the chip channel layer 5, used The conditions are the same as in Example 1. Seal the chip channel layer 5 with the glass after plasma treatment. The chip after sealing is coated with Parylene C thin film, and the amount of coating material is also 6.64g. At this time, the coating of Parylene C on the inner wall of the channel relies on the diffusion of chlorinated p-xylene monomer into the chip through the inlet and outlet, and the coating distance is limited, and only the channel near the inlet and outlet is coated with Parylene C.

[0041] figure 2 The droplet digital PCR chip consists of two parts: droplet generation and droplet storage. The droplet generating part includes an oil inlet 9, a PCR reaction solution i...

Embodiment 3

[0044] The chips fabricated by the two methods were used for digital PCR reaction respectively. The 10ul PCR reaction solution consists of the following components: 5ul 3D Digital PCR Master Mix, 0.5ul Gene Expression Assay (18S), 0.5ul 2% Tween-20, 2ul nuclease-free water, 2ul plasmid template. The composition of the solidifiable oil used to generate the droplets was: 69.2 wt% Silicone Oil PMX-200-10cSt, 12 wt% 5225C Formulation Aid, 12 wt% Bis-19, 6 wt% RTV615-B, 0.8% SM3110 Catalyst. The PCR reaction solution enters the chip from the injection port 10 at a flow rate of 100ul / h, and the oil enters the chip from the injection port 9 at a flow rate of 280ul / h. The PCR reaction solution and the oil meet at the droplet generation point 11 to generate uniform water-in-oil droplets. After the droplets are generated, they enter the buffer pool 12. The flow rate of the droplets in the buffer pool slows down, and they enter the liquid storage pool evenly in two ways. 13. A uniform...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
contact angleaaaaaaaaaa
Login to View More

Abstract

The invention provides a manufacture method of a microfluidic chip with a cannel inner wall coated with Parylene. The method comprises the steps of preparation of a die of a channel layer of the microfluidic chip, surface treatment, manufacture of the channel layer, coating of Parylene on the surface of the channel, and tight sealing with a pattern-free sealing material. The method solves a problem that the chip coated with Parylene cannot be sealed. The chip is coated with Parylene before sealed, so that the Parylene membrane is not coated on the inner wall of the channel through molecular spread, is suitable for the microfluidic chip with a complex channel network, is uniform and controllable in membrane thickness, can be coated in a shorter time, and consumes fewer material. The methodcan prevent solvents in the microfluidic chip from evaporating and prevent molecular from adsorbing and swelling. According to the manufacture method of the microfluidic chip, Parylene is coated and then the chip is sealed. Parylene can be coated on the inner wall of the complex network channel uniformly, so that the method has characteristics of being easy, rapid and economical.

Description

technical field [0001] The invention belongs to the field of microfluidic chip processing, and relates to a method for manufacturing a microfluidic chip whose inner wall of a channel is coated with Parylene. Background technique [0002] Microfluidic chips are generally manufactured using micro-electromechanical system (MEMS) processing technology, which can integrate units that perform different functions together, so that a complete set of routine chemical and biological processes such as sample preparation, reaction, separation, and detection can be realized on one chip. function of the laboratory. Microfluidic chips have the characteristics of low sample consumption, high throughput, large-scale integration, rapid mass transfer and high reaction efficiency, which make them have unique advantages in the research and application process that many conventional macro systems cannot match. At present, microfluidic chips have been applied in many fields, such as biomedical re...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
CPCB81C1/00015B81C1/00214
Inventor 牟颖吴文帅金伟
Owner ZHEJIANG UNIV