Three-layer transparent conductive film for dimming glass and preparation method thereof

Abstract

The invention relates to a three-layer structural transparent conducting thin film for switchable glass and a preparation method thereof. The technical scheme of the invention is that: an oxide targetand a metal target are installed on a magnetron sputtering system target base; in the atmosphere of argon or mixed gas of argon or hydrogen or mixed gas of argon and oxygen, oxide is deposited on thesurface of a substrate by adopting a sputtering method to obtain an oxide layer; then in the atmosphere of the mixed gas of argon or hydrogen, metal is deposited on the surface of the oxide layer byadopting the sputtering method to obtain a metal layer; and finally, in the atmosphere of argon or the mixed gas of argon or hydrogen or the mixed gas of argon and oxygen, the oxide is deposited on the metal layer by adopting the sputtering method to prepare the three-layer structural transparent conducting thin film for the switchable glass. The three-layer structural transparent conducting thinfilm for the switchable glass is simple in process and low in production cost, and the prepared product are excellent in optimal, electrical and mechanical properties. The three-layer structural transparent conducting thin film is formed by the oxide layer, the metal layer and the oxide layer, and corresponding thicknesses of the oxide layers and the metal layer are 20 to 100nm and 3 to 20nm.

Description

technical field [0001] The invention belongs to the technical field of transparent conductive films. In particular, it relates to a three-layer transparent conductive film for dimming glass and a preparation method thereof. Background technique [0002] Dimmable glass is composed of transparent conductive electrodes and liquid crystal layers. Its working principle is: in the absence of an electric field, the dimming glass is in a light-transmitting and opaque state; when the alternating current is applied, the liquid crystal molecules are arranged in an orderly manner, and the dimming glass is converted from a light-transmitting opaque state to a transparent state . Through the action of an electric field, fast and random switching between transparent and opaque states can be achieved. The transparent conductive electrodes in current dimming glass products mainly use indium tin oxide (ITO) thin film materials, which have the advantages of good light transmission, low surf...

AI Technical Summary

Problems solved by technology

However, the refinement of metal grains is not conducive to the improvement of the transparent and conductive properties of the film.

In short, there are still some deficiencies in the precise control of the thickness of metal layers such as Ag and Cu by existing methods, and the control of grain size and surface roughness.