Semiconductor structures and methods of forming them

Abstract

A semiconductor structure and a method for forming the same, the method comprising: providing a substrate, a dielectric layer is formed on the substrate, and an opening exposing the substrate is formed in the dielectric layer; through an atomic layer deposition process, the A barrier layer is formed on the bottom and side walls of the opening, and the barrier layer is doped with Ge ions; after forming the barrier layer doped with Ge ions, a copper layer electrically connected to the substrate is formed in the opening. interconnection. The barrier layer is doped with Ge ions, so after copper interconnection is formed in the opening, Ge in the barrier layer can form a Cu-Ge bond with Cu, thereby improving the barrier effect of the barrier layer on copper and improving The problem of copper diffusion can be solved, and then the electrical performance and reliability performance of the semiconductor structure can be improved, for example, the breakdown performance over time can be improved.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a semiconductor structure and a forming method thereof. Background technique [0002] With the continuous development of integrated circuit manufacturing technology, people's requirements for the integration and performance of integrated circuits are becoming higher and higher. In order to improve integration and reduce costs, the critical dimensions of components are getting smaller and the circuit density inside integrated circuits is increasing. This development makes the surface of the wafer unable to provide enough area to make the required interconnection lines. [0003] In order to meet the requirements of the interconnection line after the critical dimension is reduced, at present, the conduction between different metal layers or the metal layer and the substrate is realized through the interconnection structure. With the advancement of technology nodes, the si...

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Problems solved by technology

With the advancement of technology nodes, the size of the interconnection structure has become smaller and smaller; correspondingly, the process of forming the interconnection structure has become more and more difficult, and the formation quality of the interconnection structure has a great impact on the back end (Back End OfLine , BEOL) The performance of the circuit is greatly affected, and in severe cases, it will affect the normal operation of the semiconductor device

[0004] However, the formation process of the interconnection structure in the prior art easily leads to a decrease in the electrical performance and reliability of the semiconductor structure

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