Interface material and manufacturing method thereof.
A technology of interface materials and manufacturing methods, applied in chemical instruments and methods, lamination devices, lamination, etc., can solve the problems of high cost, protection crucible loss, etc., achieve easy production and processing, reduce loss speed, and reduce production costs Effect
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Embodiment 1
[0035] The invention provides an interface material, the interface material includes at least one layer of matrix material, and the matrix material includes graphite, nano-graphite, flake graphite, graphene, pyrolytic carbon, pyrolytic graphite, graphite powder, carbon nanotube Composed of one or more materials.
[0036] Please refer to figure 1 , the interface material 20 proposed in this embodiment can be used between the quartz crucible 30 and the protective crucible 10, as mentioned in the background, because the quartz crucible 30 is mainly silicon dioxide, which is used in the preparation of single crystal silicon hot soup To ensure the purity, the outer layer is a protective crucible 10, which is made of carbon and is used to protect the inner quartz crucible 30. However, at high temperature, the quartz crucible 30 will be decomposed into silicon and oxygen, and the oxygen will react with the external carbon, causing the external protective crucible 10 to be constantly...
Embodiment 2
[0047] Please refer to figure 2 , in this embodiment, the interface material 20 includes at least one layer of reinforcing material 22, the reinforcing material 22 is located between two layers of the matrix material 21, and the thickness of the reinforcing material ranges from 1 micron to 1500 microns , for example 500 microns.
[0048] In this embodiment, the reinforcing material 22 includes carbon fiber, graphite fiber, ceramic fiber, quartz fiber, metal fiber, zirconia, boron nitride, barium, barium carbonate, barium hydroxide, silicon nitride, boron carbide, carbide Silicon, magnesium oxide powder, metasilicate fiber, calcium aluminum silicate fiber, alumina fiber, copper, aluminum, silver, tungsten and molybdenum metal powder.
[0049] In addition, the reinforcing material 22 can also be a non-woven fabric or a woven fabric structure, including one or more of carbon fibers, graphite fibers, ceramic fibers, quartz fibers, and metal fibers.
[0050] Wherein, the reinfor...
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Abstract
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