A method of laser processing chip

A laser processing and chip technology, used in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problems of easy damage to the bottom readout circuit, damage to the bottom readout circuit, complicated corrosion process, etc., to eliminate position offset. Influence, high processing speed, small heat-affected zone effect
CN109530930BActive Publication Date: 2021-09-03北京中科镭特电子有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
北京中科镭特电子有限公司
Publication Date
2021-09-03

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Abstract

The invention provides a method for laser processing chips, comprising: building a laser processing system with lasers and optical elements; obtaining the position information of the cooling type infrared detection chip placed on the workbench; setting the processing parameters of the laser processing system according to the position information, and using the laser The processing system generates a laser processing beam according to the processing parameters; changing the relative position of the laser processing beam and the cooled infrared detection chip, so that a closed annular groove is formed between the pixel layer and the edge on the cooled infrared detection chip. The invention can evenly reduce the pulling of the overflowing filling glue around the pixel layer on the cooling type infrared detection chip when the temperature cycle passes, and then can efficiently and uniformly eliminate the thermal stress on the photosensitive layer and epoxy resin of the cooling type infrared detection chip Position offset effects between layers.
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Description

technical field

[0001] The invention relates to the technical field of laser micromachining, in particular to a method for laser machining chips. Background technique

[0002] Infrared detectors have been well used in both civil and military applications, and the performance of cooled infrared detectors is particularly excellent. The infrared detection chip in the cooling type infrared detector is often in an environment with drastic temperature changes. In order to ensure its normal working performance, the infrared detection chip in the detector needs to be cooled with liquid nitrogen during the working state. The temperature at this time is about It is -200°C, but during non-working hours, the infrared detection chip is exposed to the atmospheric temperature. For example, the highest temperature in the desert can sometimes reach about 70°C, so the ambient temperature of the infrared detection chip is between -200°C and Constantly changing between 70°C.

[0003] The stru...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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