Static electricity controllable abrasive particle flow processing method based on charge tip aggregation effect

A technology of aggregation effect and processing method, which is applied in metal processing equipment, used abrasive treatment devices, abrasive materials, etc., can solve the problems of processing efficiency, low resource utilization, and difficult to improve processing quality, so as to improve effective participation. rate, increase the probability of impact, improve the effect of processing efficiency

CN109551374AActive Publication Date: 2019-04-02ZHEJIANG UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2019-04-02

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Abstract

The invention discloses a static electricity controllable abrasive particle flow processing method based on a charge tip aggregation effect. An abrasive particle flow with non-electrolyte as a carrieris subjected to a high-voltage electrostatic field to be charged, so that the distribution of the abrasive particles in the flow field can be controlled, and negative influences produced by abrasiveparticle size unevenness and large-particle-size abrasive particles in the processing process are reduced; an electric field is applied to the flow field, the distribution characteristics of the abrasive particles with the negative charge on the collision area on the surface of a workpiece with the positive charge are changed through the electric charge tip aggregation effect, the possibility of collision of the abrasive particles to the microscopic surface crest of the workpiece is increased, workpiece surface crest removal is accelerated, the flow-in angle of the abrasive particles is periodically swung in a pulse mode, the optimal polishing alternating force acting on the workpiece is obtained by effectively adjusting and controlling the pulse frequency and the swing angle, and it is ensured that the high-quality surface is obtained on the premise of efficient removal.
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Description

technical field

[0001] The invention relates to the technical field of ultra-precision machining, and is suitable for surface grinding and polishing of workpieces such as optical elements and amorphous film substrates. More specifically, it relates to an electrostatic controllable abrasive particle flow processing method based on the effect of charge tip aggregation . Background technique

[0002] Nano-film materials have always been a hot field of scientific research in the world, because of their unique surface effects, volume effects, quantum size effects and macroscopic quantum tunnel effects, etc., and reflect various strange forces, electricity, light, magnetism, Thermal effect and chemical activity, so it has broad application prospects in the fields of microelectronics, optics, energy and so on. The substrate (such as single crystal silicon, silicon carbide, etc.) is an indispensable material in the preparation process of nanometer thin films, and plays an important...

Examples

Embodiment Construction

[0027] The present invention will be further described below in conjunction with accompanying drawing:

[0028] Such as Figure 1~6 As shown in , an electrostatic controllable abrasive flow processing method based on the charge tip aggregation effect includes the following steps:

[0029] The first step: use the negative pressure mold matching method to fix the workpiece and the negative pressure mold matching device. The sensor can realize online detection and solve the problem of repeated installation and positioning. In the mold device, the negative pressure mold matching device solves the problem of uncontrollable edge contact pressure mutation and uneven material removal, and solves its edge effect;

[0030]The second step: set up the polishing system on the workbench, combine the principle of electrostatic induction and Coulomb's law, make the abrasive grains flow with non-electrolyte as the carrier pass through the high-voltage electrostatic field, and then the abrasiv...