A High Precision Fully Differential Capacitance-Voltage Conversion Circuit System

A voltage conversion circuit, fully differential technology, applied in the field of MEMS inertial devices, can solve the problems of increased system power consumption and area, inability to obtain high-precision detection, output signal influence, etc., to suppress zero drift, eliminate low-frequency noise and offset, Improve the effect of changing accuracy
CN109669054BActive Publication Date: 2021-01-05HARBIN ENG UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
HARBIN ENG UNIV
Publication Date
2021-01-05

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Abstract

The invention relates to the field of MEMS (Micro Electro Mechanical System) inertial devices, in particular to a high-accuracy fully differential capacitance-voltage conversion circuit system. The high-accuracy fully differential capacitance-voltage conversion circuit system comprises a driving signal generation part, a fully differential charge amplifier and capacitance compensation arrays. A whole conversion circuit and a sensor sensitive structure still adopt an output mode in single-ended connection, and a fully differential circuit structure is realized through time division multiplexing; a circuit adopts a switch capacitance structure for removing the influence of parasitic capacitance, main signal channels adopt a correlated double sampling technology for removing low-frequency noise and detuning, the capacitance compensation array is capable of correcting the detuning and non-linearity of the sensor sensitive structure. According to the high-accuracy fully differential capacitance-voltage conversion circuit system disclosed by the invention, the influence of the parasitic capacitance can be effectively inhibited, common-mode interference generated by switch charge injection and substrate noise can be reduced, harmonic distortion of the circuit is reduced, the linearity of an accelerometer system is increased, and zero drift is inhibited.
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Description

technical field

[0001] The invention relates to the field of MEMS inertial devices, in particular to a high-precision fully differential capacitance-voltage conversion circuit system. Background technique

[0002] Acceleration sensors can convert weak acceleration physical signals into electrical signals that can be detected. High-precision acceleration sensors are widely used in earthquake detection, automotive safety, aerospace, space microgravity measurement and other measurement fields that require high precision. People began to study the structure and manufacturing technology of the acceleration sensor very early. With the development and popularization of MEMS technology in recent years, the integration of microelectronics technology and mechanical engineering makes the acceleration sensor no matter in structure or performance. There have been great improvements and improvements. Capacitive acceleration sensor is currently the most researched type of acceleration sen...

Claims

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