Composite coating, coating equipment and coating method
A technology of composite coating and coating equipment
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Embodiment 1
[0103] Process A: Magnet Preparation Process
[0104] Step 1, prepare main alloy raw materials and auxiliary alloy raw materials according to the mass ratio of each element, and the mass ratio of each element of the main alloy raw materials is (PrNd) 31 Al 0.2 co 1.0 Cu 0.1 Ga 0.51 B 0.97 Fe bal , the mass ratio of each element of the auxiliary alloy raw material is (PrNd) 32.5 Al 0.15 co 1.0 Cu 0.1 Ga 0.51 B 0.89 Fe bal . Fe bal It is the balance ratio of Fe element, that is, the sum of the mass ratios of all elements is 100%.
[0105] Step 2. Melt the main alloy raw material and the auxiliary alloy raw material in a 600Kg / time stripcasting furnace (stripcasting), and perform scale casting at a roller speed of 1.5m / s per second, and finally obtain the average thickness 0.15mm main alloy flakes and auxiliary alloy flakes.
[0106] Step 3. The main alloy flakes and the auxiliary alloy flakes are subjected to hydrogen crushing, specifically dehydrogenation at 540...
Embodiment 2
[0152] Process A: Magnet preparation process:
[0153] The magnet preparation process is the same as in Example 1, but the magnet does not undergo the tempering heat treatment in step 7 before slicing.
[0154] Process B: Sputtering process for surface coating of magnets
[0155] Step 1. Place the tray on the sampling table, arrange the magnets processed in process A tightly on the stainless steel tray, make the direction of the magnet size 2mm upward, and the size of the tray is 1300×1000mm. Compressed air is required to clean the magnet surfaces.
[0156] Step 2. Pre-evacuate the sampling chamber, the second buffer chamber, and the cooling chamber to 10 -1 Pa, pre-evacuate the cleaning chamber, coating chamber and first buffer chamber to 7×10 -3 Pa, and then pass argon gas to the cleaning chamber, coating chamber, and first buffer chamber, and the stable pressure is 0.6MPa.
[0157] Step 3. Use the tray to send the arranged magnets into the sampling chamber, and vacuum t...
Embodiment 3
[0172] Process A: Magnet preparation process:
[0173] The magnet preparation process is the same as in Example 1, but the magnet does not undergo the tempering heat treatment in step 7 before slicing.
[0174] Process B: Sputtering process for surface coating of magnets
[0175] Step 1. Place the tray on the sampling table, arrange the magnets processed in process A tightly on the stainless steel tray, make the direction of the magnet size 2mm upward, and the size of the tray is 1300×1000mm. Compressed air is required to clean the magnet surfaces.
[0176] Step 2. Pre-evacuate the sampling chamber, the second buffer chamber, and the cooling chamber to 10 -1 Pa, pre-evacuate the cleaning chamber, coating chamber and first buffer chamber to 7×10 -3 Pa, and then pass argon gas to the cleaning chamber, coating chamber, and first buffer chamber, and the stable pressure is 0.7MPa.
[0177] Step 3. Use the tray to send the arranged magnets into the sampling chamber, and vacuum t...
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