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Graphene mid-infrared detector based on phonon exciton enhancement and preparation method thereof

A graphene, infrared light technology, applied in electrical components, semiconductor devices, final product manufacturing, etc., can solve the problems of low coupling efficiency and large loss, and achieve the effect of small coupling loss, low cost, and enhanced absorption

Pending Publication Date: 2019-08-06
深圳激子科技有限公司
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Problems solved by technology

However, surface plasmon resonances based on metal structures generally have large losses and low coupling efficiency

Method used

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  • Graphene mid-infrared detector based on phonon exciton enhancement and preparation method thereof
  • Graphene mid-infrared detector based on phonon exciton enhancement and preparation method thereof
  • Graphene mid-infrared detector based on phonon exciton enhancement and preparation method thereof

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Embodiment Construction

[0038] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0039] figure 1 A graphene-based mid-infrared photodetector based on phonon excitons enhancement described in a preferred embodiment of the present invention includes a silicon substrate 1, a silicon dioxide layer 2, and a graphene layer stacked sequentially from bottom to top. Layer 3 and the molybdenum trioxide micro-nano structure array 4 covered on the graphene layer 3; the area of ​​the graphene layer 3 is smaller than the area of ​​the silicon dioxide layer 2, and the area of ​​the molybdenum trioxide micro-nano structure array 4 is smaller than the graphene layer 3 The area of ​​the molybdenum trioxide micro-nano structure array 4 and the graphene layer 3 form a ph...

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Abstract

The invention relates to a graphene mid-infrared detector based on phonon exciton enhancement and a preparation method thereof, and belongs to the technical field of mid-infrared detection. The graphene mid-infrared detector comprises a silicon substrate, a silicon dioxide layer, a graphene layer and a molybdenum trioxide micro-nanostructure array covering the graphene layer which are laminated inturn from bottom to top, wherein the molybdenum trioxide micro-nanostructure array and the graphene layer form a phonon exciton enhanced heterostructure; and the edge of the graphene layer is provided with an electrode above, and the electrode extends an overlapping region of the molybdenum trioxide micro-nanostructure array and the graphene layer. In order to solve the technical problems, the graphene mid-infrared detector achieves the purposes of greatly improving the photoelectric conversion efficiency in the mid-infrared band and being simple in preparation method and low in cost.

Description

technical field [0001] The invention belongs to the technical field of mid-infrared light detection. Background technique [0002] Graphene, as an excellent optoelectronic material, has great potential in the field of mid-infrared light detection. Based on its unique energy band characteristics, the working wavelength range of graphene mesophotodetectors is ultra-wide and tunable. At present, the mid-infrared photodetectors using graphene as the light-absorbing functional layer generally have large dark current, low signal-to-noise ratio, and low light absorption rate (~2.3%) of the single atomic layer, so that based on single atomic layer intrinsic graphite Optoelectronic devices based on alkenes cannot achieve sufficiently strong light-matter interactions. In order to solve this problem, surface plasmons are usually used to enhance infrared light absorption, and noble metal nanostructure arrays are integrated on graphene devices to expand the photoresponsive area to impr...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0264H01L31/09H01L31/18
CPCH01L31/0264H01L31/18H01L31/09Y02P70/50
Inventor 鲍小志马玮良欧清东
Owner 深圳激子科技有限公司
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