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A diamond-like coating composed of graphite-like particles and its preparation method and application

A diamond coating, graphite particle technology, applied in metal material coating process, coating, vacuum evaporation plating and other directions, can solve the problems of poor wear resistance and high friction coefficient, achieve excellent mechanical properties, high self-lubrication performance, wear resistance and self-lubricating properties

Active Publication Date: 2021-03-09
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, at this stage, the friction performance of hydrogen-free DLC prepared by magnetron sputtering still has a certain gap compared with hydrogen-containing DLC. The friction coefficient in dry air has reached more than 0.6, the friction coefficient is high, and the wear resistance is poor. Friction performance cannot be compared with hydrogen-containing DLC ​​under the same conditions
In recent years, a large number of studies at home and abroad have shown that a sp 2 The graphite-like carbon film (Graphite Like Carbon, GLC) mainly bonded carbon has excellent tribological properties, and its friction performance is close to that of hydrogen-containing DLC, but its mechanical properties are still not as good as sp 3 Compared with hydrogen-free DLC mainly bonded carbon, the preparation of a carbon-based film with excellent mechanical properties and tribological properties, so that it can meet the application under harsh working conditions has always been a research hotspot.

Method used

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  • A diamond-like coating composed of graphite-like particles and its preparation method and application
  • A diamond-like coating composed of graphite-like particles and its preparation method and application

Examples

Experimental program
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Effect test

Embodiment 1

[0032] 1. Preparation:

[0033] S1. The ion coating machine is equipped with a graphite target and a metal target. The graphite target is a flat target with a purity of 99.99%; the metal target is a Ti columnar target with a purity of 99.99%. The workpiece support is installed in the middle of the vacuum chamber.

[0034] S2. Cleaning the substrate: send the polished (100) oriented single crystal silicon substrate into an ultrasonic cleaning machine, and perform ultrasonic cleaning with acetone and absolute ethanol for 30 minutes respectively, and then clean it with deionized water, and then wash it with a purity ≥ 99.5% nitrogen blow dry.

[0035] S3. Vacuuming and ion beam etching cleaning chamber: clean the coating chamber with a high-power vacuum cleaner; place the substrate after ultrasonic cleaning on the workpiece support in the vacuum chamber, and vacuum the vacuum chamber to a vacuum of 5.0×10 -3 Below Pa, set the temperature to 80°C and then turn on the ion source, ...

Embodiment 2

[0041] 1. Preparation:

[0042] S1. The ion coating machine is equipped with a graphite target and a metal target. The graphite target is a flat target with a purity of 99.99%; the metal target is a Ti columnar target with a purity of 99.99%. The workpiece support is installed in the middle of the vacuum chamber.

[0043] S2. Clean the substrate: send the polished WC-Co cemented carbide substrate to the ultrasonic cleaning machine, and use acetone and absolute ethanol to conduct ultrasonic waves at 30kHz respectively. Clean for 30 minutes, then rinse with deionized water, and dry with nitrogen with a purity of ≥99.5%.

[0044] S3. Vacuuming and ion beam etching cleaning chamber: clean the coating chamber with a high-power vacuum cleaner; place the substrate after ultrasonic cleaning on the workpiece support in the vacuum chamber, and vacuum the vacuum chamber to a vacuum of 5.0×10 -3 Below Pa, the temperature is set to 100°C, then the ion source is turned on, 300 sccm of argo...

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Abstract

The invention belongs to the technical field of surface protection, and discloses a graphite-particle-like composite diamond-like coating and a preparation method and application thereof. A diamond-like coating adopts a magnetron sputtering coating and takes a graphite target and a metal target as raw materials, and the graphite-particle-like composite diamond-like coating is formed by sputteringdeposition on a substrate by adjusting the air pressure of sputtering gas and the power, pulse width and frequency of magnetron sputtering. The diamond-like coating is a carbon-based film with the characteristics of high hardness, anti-friction, wear resistance, excellent self-lubrication properties and the like. The graphite-particle-like composite diamond-like coating is simple in preparation process, high in film-forming quality and stable in performance, and can be widely applied to protection of surfaces of products such as machinery and molds.

Description

technical field [0001] The invention belongs to the technical field of surface protection, and more specifically relates to a diamond-like coating (DLC) composited with graphite-like (GLC) particles and a preparation method and application thereof. Background technique [0002] Diamond Like Carbon (DLC) coating is an amorphous metastable carbon-based film, and the carbon atoms are mainly sp 3 and sp 2 Hybrid bonding can be divided into two types: hydrogen-containing DLC ​​(a-C:H) and hydrogen-free DLC (a-C or ta-C). Although hydrogen-containing DLC ​​has an extremely low friction coefficient and good wear resistance, it has low hardness and poor mechanical properties. The carbon source gas such as methane or acetylene introduced during the industrial preparation process is easy to contaminate the target and ion source. Seriously affect production efficiency. Therefore, hydrogen-free DLC is the preferred method for the industrial preparation of DLC with high hardness. Hyd...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/02C23C14/16C23C14/18
CPCC23C14/022C23C14/0605C23C14/165C23C14/185C23C14/35
Inventor 代伟李谞王启民
Owner GUANGDONG UNIV OF TECH