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A kind of ceramic target material and preparation method thereof

A technology of ceramic target material and target blank, applied in the field of sputtering target material

Active Publication Date: 2021-11-19
XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the highest efficiency of CZTSe is only 12.6%, which is much lower than the 21.7% of its sister compound copper indium gallium selenide (CIGS)

Method used

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Examples

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Effect test

preparation example Construction

[0029] The invention provides a preparation method of a ceramic target, comprising the following steps:

[0030] A) homogeneously mixing the copper-zinc-tin-selenium powder and rubidium fluoride powder, and pre-pressing the homogeneously mixed powder to obtain a green body;

[0031] B) under vacuum conditions, heating the green body to 200-400°C and keeping it warm;

[0032] C) Then heat to 600-700°C, heat-preserve and carry out hot-press sintering at 25-50MPa, cool down and depressurize to obtain the target blank;

[0033] D) Machining the target blank to obtain a ceramic target material.

[0034] In an embodiment of the present invention, the copper-zinc-tin-selenium powder is prepared by ball milling a copper-zinc-tin-selenide alloy. The purity of the copper-zinc-tin-selenide alloy is not less than 4N. In some embodiments, the purity of the copper-zinc-tin-selenide alloy is 4N, 4.5N or 5N.

[0035] In some embodiments of the present invention, after the ball milling, it...

Embodiment 1

[0071] The copper-zinc-tin-selenium alloy with a purity of 4N is ball milled into powder by a planetary ball mill, and sieved with a 304 stainless steel screen of China Industrial No. Take 2000g of the obtained powder and put it into a clean PV barrel, weigh 8.24g of RbF powder with an electronic balance with an accuracy of 0.0001g and put it into the PV barrel, then put 2000g of Φ5mm and 3000g of Φ10mm zirconium balls into the PV barrel respectively 100mL / min inflated with nitrogen gas for 50min to remove the air in the PV bucket, covered with electrical tape, and finally placed on a ball mill and mixed homogeneously for 8h. Put the obtained homogeneous powder into the graphite mold, and pre-press after putting on the furnace. When the vacuum degree is 5.5Pa, turn on the heating power supply and raise the temperature to 280°C at a heating rate of 7°C / min, and keep it for 80 minutes; then raise the temperature to 600°C at a heating rate of 15°C / min, and keep it for 20 minutes,...

Embodiment 2

[0073] The copper-zinc-tin-selenium alloy with a purity of 4.5N is ball-milled into powder with a planetary ball mill, and sieved with a 304 stainless steel sieve from China Industrial No. 540 Factory to obtain about 5000 g of powder with a particle size of 40-180 μm. Put 1400g of the obtained powder into a clean PV barrel, weigh 5.768g of RbF powder with an electronic balance with an accuracy of 0.0001g and put it into the PV barrel, and then put 1200g of Φ5mm and 2300g of Φ10mm zirconium balls into the PV In the barrel, fill it with nitrogen gas at an inflation rate of 200mL / min for 40min to remove the air in the PV barrel, cover it with electrical tape and seal it, and finally put it on a ball mill and mix it homogeneously for 10h. Put the obtained homogeneous powder into the graphite mould, and pre-press after putting into the furnace. When the vacuum degree is 4.5Pa, turn on the heating power supply and raise the temperature to 300°C at a heating rate of 9°C / min, and keep...

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Abstract

The invention relates to the technical field of sputtering targets, in particular to a ceramic target and a preparation method thereof. The preparation method includes: A) homogeneously mixing the copper-zinc-tin-selenium powder and rubidium fluoride powder, and pre-pressing the homogeneously mixed powder to obtain a green body; B) in a vacuum Under certain conditions, heat the green body to 200-400°C and keep it warm; C) then heat it to 600-700°C, heat it and carry out hot-press sintering at 25-50MPa, after cooling down and decompressing, the target blank is obtained ; D) machining the target blank to obtain a ceramic target material. The ceramic target material prepared by the preparation method provided by the invention has high purity and density and uniform components. It provides a certain theoretical reference for the preparation of high-performance doped targets. The results show that the purity of the ceramic target prepared by the present invention is >99.99%, and the density is 5.53-5.58g / cm 3 , The relative density is 94-95%.

Description

technical field [0001] The invention relates to the technical field of sputtering targets, in particular to a ceramic target and a preparation method thereof. Background technique [0002] Thin-film solar cells have the advantages of low cost and high photoelectric conversion efficiency. At present, in the research of thin-film solar cells, solar absorbing layers such as copper indium gallium selenide (CIGS) formed with a chalcopyrite structure and cadmium telluride (CdTe) formed with a zinc blende structure have attracted extensive attention. where Cu(In,Ga)Se 2 The highest conversion rates of CdTe and CdTe compound thin film solar cells are 21.7% and 21%, respectively, which have broad application and research prospects. However, the limited amount of In, Ga, and Te stored in the earth's crust, and the severe toxicity of Cd limit the widespread application of CIGS and CdTe thin film solar cells. In addition, the main components of CIGS thin film solar cells include Cu, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/547
CPCC04B35/547C04B2235/445C04B2235/77C04B2235/96
Inventor 沈文兴朱刘童培云白平平
Owner XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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